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NEXAFS study on the local structures of DLC thin films formed by Ar cluster ion beam assisted deposition
Mapping Intimacies
◽
10.1063/1.1619824
◽
2003
◽
Author(s):
Kazuhiro Kanda
Keyword(s):
Thin Films
◽
Ion Beam
◽
Local Structures
◽
Ion Beam Assisted Deposition
◽
Cluster Ion
Download Full-text
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References
Formation of oxide thin films for optical applications by O/sub 2/-cluster ion beam assisted deposition
1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144)
◽
10.1109/iit.1998.813898
◽
2002
◽
Author(s):
H. Katsumata
◽
J. Matsuo
◽
T. Nishihara
◽
T. Tachibana
◽
E. Minami
◽
...
Keyword(s):
Thin Films
◽
Ion Beam
◽
Oxide Thin Films
◽
Ion Beam Assisted Deposition
◽
Cluster Ion
◽
Optical Applications
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Glancing Angle Fluorescence XAFS Study on Metal Oxide Thin Films Obtained by Oxygen Gas Cluster Ion Beam Assisted Deposition Techniques
Physica Scripta
◽
10.1238/physica.topical.115a00504
◽
2005
◽
pp. 504
Author(s):
H. Kageyama
◽
T. Asanuma
◽
T. Takeuchi
◽
K. Kadono
◽
J. Matsuo
◽
...
Keyword(s):
Thin Films
◽
Ion Beam
◽
Metal Oxide Thin Films
◽
Ion Beam Assisted Deposition
◽
Glancing Angle
◽
Cluster Ion
◽
Oxygen Gas
◽
Gas Cluster Ion Beam
◽
Fluorescence Xafs
◽
Deposition Techniques
Download Full-text
Plasmonic properties of titanium nitride thin films prepared by ion beam assisted deposition
Materials Letters
◽
10.1016/j.matlet.2016.08.147
◽
2016
◽
Vol 185
◽
pp. 295-298
◽
Cited By ~ 10
Author(s):
Lin-Ao Zhang
◽
Hao-Nan Liu
◽
Xiao-Xia Suo
◽
Shuo Tong
◽
Ying-Lan Li
◽
...
Keyword(s):
Thin Films
◽
Titanium Nitride
◽
Ion Beam
◽
Ion Beam Assisted Deposition
Download Full-text
Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition
Thin Solid Films
◽
10.1016/j.tsf.2005.06.035
◽
2005
◽
Vol 492
(1-2)
◽
pp. 203-206
◽
Cited By ~ 26
Author(s):
Zhi Yan
◽
Zhi Tang Song
◽
Wei Li Liu
◽
Qing Wan
◽
Fu Min Zhang
◽
...
Keyword(s):
Thin Films
◽
Zinc Oxide
◽
Electrical Properties
◽
Ion Beam
◽
Optical And Electrical Properties
◽
Oxide Thin Films
◽
Ion Beam Assisted Deposition
◽
P Type
Download Full-text
Ion beam assisted deposition of niobium nitride thin films for vacuum microelectronics devices
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/s0168-583x(98)00679-x
◽
1999
◽
Vol 148
(1-4)
◽
pp. 925-929
◽
Cited By ~ 49
Author(s):
Y Gotoh
◽
M Nagao
◽
T Ura
◽
H Tsuji
◽
J Ishikawa
Keyword(s):
Thin Films
◽
Ion Beam
◽
Niobium Nitride
◽
Vacuum Microelectronics
◽
Ion Beam Assisted Deposition
Download Full-text
Mechanical properties of silicon oxynitride thin films prepared by low energy ion beam assisted deposition
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/s0168-583x(98)00811-8
◽
1999
◽
Vol 148
(1-4)
◽
pp. 599-603
◽
Cited By ~ 14
Author(s):
Yukari Shima
◽
Hiroki Hasuyama
◽
Toshiharu Kondoh
◽
Yasuo Imaoka
◽
Takanori Watari
◽
...
Keyword(s):
Thin Films
◽
Mechanical Properties
◽
Ion Beam
◽
Silicon Oxynitride
◽
Low Energy
◽
Ion Beam Assisted Deposition
Download Full-text
Cluster Ion Beam– Assisted Deposition
Materials Processing by Cluster Ion Beams
◽
10.1201/b18745-12
◽
2015
◽
pp. 192-211
Keyword(s):
Ion Beam
◽
Ion Beam Assisted Deposition
◽
Cluster Ion
Download Full-text
A rate-equation model for the growth of metallic thin films in ion beam assisted deposition
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/s0168-583x(01)00821-7
◽
2001
◽
Vol 184
(4)
◽
pp. 523-530
◽
Cited By ~ 7
Author(s):
J. Sillanpää
◽
I.T. Koponen
◽
N. Grønbech-Jensen
Keyword(s):
Thin Films
◽
Rate Equation
◽
Ion Beam
◽
Equation Model
◽
Metallic Thin Films
◽
Rate Equation Model
◽
Ion Beam Assisted Deposition
Download Full-text
Irradiation effect on magnetic properties of FeRh thin films with energetic C60 cluster ion beam
AIP Advances
◽
10.1063/1.5007704
◽
2018
◽
Vol 8
(5)
◽
pp. 056433
◽
Cited By ~ 3
Author(s):
Ryunosuke Soma
◽
Yuichi Saitoh
◽
Masako Sakamaki
◽
Kenta Amemiya
◽
Akihiro Iwase
◽
...
Keyword(s):
Thin Films
◽
Magnetic Properties
◽
Ion Beam
◽
Irradiation Effect
◽
Cluster Ion
Download Full-text
Mössbauer spectroscopic study of iron–nickel nitrides thin films prepared by ion beam assisted deposition
Hyperfine Interactions
◽
10.1007/s10751-011-0359-8
◽
2011
◽
Vol 202
(1-3)
◽
pp. 47-55
Author(s):
P. Prieto
◽
M. Monti
◽
J. de la Figuera
◽
J. M. Sanz
◽
J. F. Marco
Keyword(s):
Thin Films
◽
Spectroscopic Study
◽
Ion Beam
◽
Ion Beam Assisted Deposition
◽
Iron Nickel
Download Full-text
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