DLC film formation by Ar cluster ion beam assisted deposition

2001 ◽  
Author(s):  
Teruyuki Kitagawa
Keyword(s):  
Film Formation ◽  
Ion Beam ◽  
Dlc Film ◽  
Ion Beam Assisted Deposition ◽  
Cluster Ion

Hard DLC film formation by gas cluster ion beam assisted deposition

2003 ◽  
Vol 201 (2) ◽  
pp. 405-412 ◽  
Author(s):  
Teruyuki Kitagawa ◽  
Isao Yamada ◽  
Noriaki Toyoda ◽  
Harushige Tsubakino ◽  
Jiro Matsuo ◽  
...  
Keyword(s):  
Film Formation ◽  
Ion Beam ◽  
Dlc Film ◽  
Ion Beam Assisted Deposition ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam

Optical thin film formation by gas-cluster ion beam assisted deposition

1999 ◽  
Author(s):  
H. Katsumata ◽  
J. Matsuo ◽  
T. Nishihara ◽  
T. Tachibana ◽  
K. Yamada ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beam ◽  
Optical Thin Film ◽  
Ion Beam Assisted Deposition ◽  
Cluster Ion ◽  
Thin Film Formation ◽  
Gas Cluster Ion Beam

Influence of residual Ar+ in Ar cluster ion beam for DLC film formation

2003 ◽  
Vol 206 ◽  
pp. 884-888 ◽  
Author(s):  
Teruyuki Kitagawa ◽  
Kazuya Miyauchi ◽  
Noriaki Toyoda ◽  
Kazuhiro Kanda ◽  
Tokumi Ikeda ◽  
...  
Keyword(s):  
Film Formation ◽  
Ion Beam ◽  
Dlc Film ◽  
Cluster Ion
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