Optical thin film formation by gas-cluster ion beam assisted deposition

1999 ◽  
Author(s):  
H. Katsumata ◽  
J. Matsuo ◽  
T. Nishihara ◽  
T. Tachibana ◽  
K. Yamada ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beam ◽  
Optical Thin Film ◽  
Ion Beam Assisted Deposition ◽  
Cluster Ion ◽  
Thin Film Formation ◽  
Gas Cluster Ion Beam

Diamond-like carbon thin film formation by ion-beam-assisted deposition

1994 ◽  
Vol 66 (1-3) ◽  
pp. 514-518 ◽  
Author(s):  
Yoshinori Funada ◽  
Kaoru Awazu ◽  
Kisaburo Shimamura ◽  
Hiroshi Watanabe ◽  
Masaya Iwaki
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beam ◽  
Diamond Like Carbon ◽  
Ion Beam Assisted Deposition ◽  
Carbon Thin Film ◽  
Thin Film Formation

Hard DLC film formation by gas cluster ion beam assisted deposition

2003 ◽  
Vol 201 (2) ◽  
pp. 405-412 ◽  
Author(s):  
Teruyuki Kitagawa ◽  
Isao Yamada ◽  
Noriaki Toyoda ◽  
Harushige Tsubakino ◽  
Jiro Matsuo ◽  
...  
Keyword(s):  
Film Formation ◽  
Ion Beam ◽  
Dlc Film ◽  
Ion Beam Assisted Deposition ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam
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