Materials Processing by Cluster Ion Beams
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10

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(FIVE YEARS 0)

Published By CRC Press

9780429194573

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Gas Cluster Ion Beam Equipment

Materials Processing by Cluster Ion Beams ◽

10.1201/b18745-8 ◽

2015 ◽

pp. 102-131

Keyword(s):

Ion Beam ◽

Cluster Ion ◽

Gas Cluster Ion Beam

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Ion Beam Technology: Overview and History

Materials Processing by Cluster Ion Beams ◽

10.1201/b18745-5 ◽

2015 ◽

pp. 18-37

Keyword(s):

Ion Beam

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Applications

Materials Processing by Cluster Ion Beams ◽

10.1201/b18745-13 ◽

2015 ◽

pp. 212-251

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Cluster Ion Beam– Assisted Deposition

Materials Processing by Cluster Ion Beams ◽

10.1201/b18745-12 ◽

2015 ◽

pp. 192-211

Keyword(s):

Ion Beam ◽

Ion Beam Assisted Deposition ◽

Cluster Ion

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Cluster Ion Beam Sputtering

Materials Processing by Cluster Ion Beams ◽

10.1201/b18745-10 ◽

2015 ◽

pp. 148-173

Keyword(s):

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Cluster Ion

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History and Milestones of Cluster Beam Development

Materials Processing by Cluster Ion Beams ◽

10.1201/b18745-6 ◽

2015 ◽

pp. 38-75

Keyword(s):

Cluster Beam

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Cluster Ion Implantation

Materials Processing by Cluster Ion Beams ◽

10.1201/b18745-11 ◽

2015 ◽

pp. 174-191

Keyword(s):

Ion Implantation ◽

Cluster Ion

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Cluster Ion– Solid Surface Interaction Kinetics

Materials Processing by Cluster Ion Beams ◽

10.1201/b18745-9 ◽

2015 ◽

pp. 132-147

Keyword(s):

Solid Surface ◽

Surface Interaction ◽

Interaction Kinetics ◽

Cluster Ion

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Conclusions

Materials Processing by Cluster Ion Beams ◽

10.1201/b18745-14 ◽

2015 ◽

pp. 252-255

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Development of Cluster Beam Sources for Solid Materials

Materials Processing by Cluster Ion Beams ◽

10.1201/b18745-7 ◽

2015 ◽

pp. 76-101

Keyword(s):

Cluster Beam ◽

Solid Materials

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