Ultra-Thin SiO2/Si Interface Quality In-Line Monitoring Using Multiwavelength Room Temperature Photoluminescence and Raman Spectroscopy
2014 ◽
Vol 3
(11)
◽
pp. N142-N150
◽
2013 ◽
Vol 28
(9)
◽
pp. 1269-1277
◽
2013 ◽
Vol 2
(5)
◽
pp. P214-P224
◽
Keyword(s):
Keyword(s):