Visualization of Plasma Etching Damage of Si Using Room Temperature Photoluminescence and Raman Spectroscopy
2013 ◽
Vol 2
(5)
◽
pp. P214-P224
◽
Keyword(s):
2013 ◽
Vol 28
(9)
◽
pp. 1269-1277
◽
2014 ◽
Vol 3
(11)
◽
pp. N142-N150
◽
Keyword(s):
1998 ◽
Vol 31
(2)
◽
pp. 159-164
◽
2010 ◽
Vol 663-665
◽
pp. 324-327
2002 ◽
Vol 16
(06n07)
◽
pp. 1047-1051