PFC-Free Dry Etching Method for Si Using Narrow-Gap VHF Plasma at Subatmospheric Pressure

2010 ◽  
Vol 157 (2) ◽  
pp. D85 ◽  
Author(s):  
Hiromasa Ohmi ◽  
Kazuya Kishimoto ◽  
Hiroaki Kakiuchi ◽  
Kiyoshi Yasutake
Keyword(s):  
Dry Etching ◽  
Narrow Gap ◽  
Subatmospheric Pressure ◽  
Etching Method

New Dry Etching Method for the Fabrication of InP/InGaAs Quantum Wires

1991 ◽  
Vol 30 (Part 2, No. 2B) ◽  
pp. L252-L254 ◽  
Author(s):  
Jean-Noël Patillon ◽  
Charlotte Jay ◽  
Claude Delalande ◽  
Michel Iost ◽  
Jean-Pierre Andre ◽  
...  
Keyword(s):  
Quantum Wires ◽  
Dry Etching ◽  
Etching Method

Hydrogen plasma dry etching method for field emission application

2006 ◽  
Vol 88 (26) ◽  
pp. 263118 ◽  
Author(s):  
T. C. Cheng ◽  
J. Shieh ◽  
W. J. Huang ◽  
M. C. Yang ◽  
M. H. Cheng ◽  
...  
Keyword(s):  
Field Emission ◽  
Hydrogen Plasma ◽  
Dry Etching ◽  
Etching Method

Fabrication of Oxide TFTs with Al[sub 2]O[sub 3]/ZnO Gate Stacks Patterned Using a Dry Etching Method

2008 ◽  
Vol 11 (2) ◽  
pp. J15 ◽  
Author(s):  
Sung-Min Yoon ◽  
Sang-Hee Ko Park ◽  
Chi-Sun Hwang ◽  
Hye Yong Chu ◽  
Kyoung Ik Cho
Keyword(s):  
Dry Etching ◽  
Gate Stacks ◽  
Etching Method ◽  
Oxide Tfts

A Novel Plasma-Based Copper Dry Etching Method

2000 ◽  
Vol 39 (Part 2, No. 3A/B) ◽  
pp. L188-L190 ◽  
Author(s):  
Yue Kuo ◽  
Sangheon Lee
Keyword(s):  
Dry Etching ◽  
Etching Method

A dry etching method for 4H-SiC via using photoresist mask

2020 ◽  
Vol 531 ◽  
pp. 125351
Author(s):  
Rui Liu ◽  
Hao Wu ◽  
Hongdan Zhang ◽  
Chen Li ◽  
Liang Tian ◽  
...  
Keyword(s):  
Dry Etching ◽  
Etching Method ◽  
Photoresist Mask
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