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2009 ◽  
Author(s):  
ChaBum Lee ◽  
DoKyun Woo ◽  
JaeYoung Joo ◽  
Sun-Kyu Lee
Keyword(s):  
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Atom Beam ◽  
Etching Method ◽  
Reflection Gratings ◽  
Fast Atom Beam ◽  
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Laser-Sustained Plasma in a Sonic Nozzle Probed by Fast Atom Beam

2007 ◽  
Vol 21 (4) ◽  
pp. 763-771 ◽  
Author(s):  
K. Amic ◽  
A. Lebéhot ◽  
J. D. Parisse
Keyword(s):  
Atom Beam ◽  
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Fast atom beam bombardment secondary ion mass spectrometry: FAB-SIMS

1993 ◽  
Vol 70-71 ◽  
pp. 287-290 ◽  
Author(s):  
Hideaki Hayashi ◽  
Tohru Satake ◽  
Kazuhiko Kaneko ◽  
Kazutosi Nagai
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Atom Beam ◽  
Ion Mass Spectrometry ◽  
Fast Atom Beam ◽  
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scholarly journals Freestanding HfO2 grating fabricated by fast atom beam etching

2011 ◽  
Vol 6 (1) ◽  
Author(s):  
Yongjin Wang ◽  
Tong Wu ◽  
Yoshiaki Kanamori ◽  
Kazuhiro Hane
Keyword(s):  
Atom Beam ◽  
Fast Atom Beam ◽  
Fast Atom Beam Etching
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