The Effects of Moisture on Strain Relief of Si‒O Bonds in Plasma‐Enhanced Chemical Vapor Deposited Silicon Dioxide Films

1997 ◽  
Vol 144 (9) ◽  
pp. 3265-3270 ◽  
Author(s):  
M. S. Haque ◽  
H. A. Naseem ◽  
W. D. Brown
Keyword(s):  
Silicon Dioxide ◽  
Chemical Vapor ◽  
Strain Relief ◽  
Silicon Dioxide Films ◽  
Chemical Vapor Deposited

Improving stress stability in low-pressure chemical vapor deposited silicon dioxide films by ion implantation

2016 ◽  
Vol 598 ◽  
pp. 103-108 ◽  
Author(s):  
Haiping Shang ◽  
Jianyu Fu ◽  
Changqing Xie ◽  
Zhigang Li ◽  
Dapeng Chen
Keyword(s):  
Ion Implantation ◽  
Silicon Dioxide ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Silicon Dioxide Films ◽  
Chemical Vapor Deposited ◽  
Pressure Chemical
Sign in / Sign up

Export Citation Format

Share Document