New Flip-Chip Interconnect Technology for High Performance and High Reliability Applications

2013 ◽  
Vol 52 (1) ◽  
pp. 709-715 ◽  
Author(s):  
E. Yamaguchi ◽  
M. Tsuji ◽  
N. Shimoishizaka ◽  
T. Nakano ◽  
K. Hirata
2015 ◽  
Vol 12 (3) ◽  
pp. 111-117
Author(s):  
Woon-Seong Kwon ◽  
Suresh Ramalingam ◽  
Xin Wu ◽  
Liam Madden ◽  
C. Y. Huang ◽  
...  

This article introduces the first comprehensive demonstration of new innovative technology comprising multiple key technologies for highly cost-effective and high-performance Xilinx field programmable gate array (FPGA), which is so-called stack silicon-less interconnect technology (SLIT) that provides the equivalent high-bandwidth connectivity and routing design-rule as stack silicon interconnect (SSI) technology at a cost-effective manner. We have successfully demonstrated the overall process integration and functions of our new SLIT-employed package using Virtex®-7 2000T FPGA product with chip-to-wafer stacking, wafer-level flux cleaning, microbump underfilling, mold encapsulation, and backside silicon removal. Of all technology elements, both full silicon removal process with faster etching and no dielectric layer damage and wafer warpage management after full silicon etching are most crucial elements to realize the SLIT technology. To manage the wafer warpage after full Si removal, a couple of knobs are identified and used such as top reinforcement layer, microbump underfill properties tuning, die thickness, die-to-die space, and total thickness adjustments. It is also discussed in the article how the wafer warpage behaves and how the wafer warpage is managed. New SLIT module shows excellent warpage characteristics of only −30 μm ∼ −40 μm at room temperature (25°C) for 25 mm × 31 mm in size and +20 μm ∼ +25 μm at reflow temperature (250°C). Thermal simulation results shows that thermal resistance of new SLIT package is almost comparable to that of standard 2000T flip-chip ball grid array (FC-BGA) package using through silicon via interposer with standard heat sink configuration and air wind condition. The reliability assessment is now under the study.


Author(s):  
Gino Hung ◽  
Ho-Yi Tsai ◽  
Chun An Huang ◽  
Steve Chiu ◽  
C. S. Hsiao

A high reliability and high thermal performance molding flip chip ball grid arrays structure which was improved from Terminator FCBGA®. (The structure are shown as Fig. 1) It has many advantages, like better coplanarity, high through put (multi pes for each shut of molding process), low stress, and high thermal performance. In conventional flip chip structure, underfill dispenses and cure processes are a bottleneck due to low through put (dispensing unit by unit). For the high performance demand, large package/die size with more integrated functions needs to meet reliability criteria. Low k dielectric material, lead free bump especially and the package coplanarity are also challenges for package development. Besides, thermal performance is also a key concern with high power device. From simulation and reliability data, this new structure can provide strong bump protection and reach high reliability performance and can be applied for low-K chip and all kind of bump composition such as tin-lead, high lead, and lead free. Comparing to original Terminator FCBGA®, this structure has better thermal performance because the thermal adhesive was added between die and heat spreader instead of epoxy molding compound (EMC). The thermal adhesive has much better thermal conductivity than EMC. Furthermore, this paper also describes the process and reliability validation result.


2012 ◽  
Vol 2012 (1) ◽  
pp. 000482-000490
Author(s):  
Eiji Yamaguchi ◽  
Mutsuo Tsuji ◽  
Nozomi Shimoishizaka ◽  
Takahiro Nakano ◽  
Katsunori Hirata

As the current and next generation devices are embracing geometries below 28nm and requiring softer low-K dielectric isolation on very thin large silicon dies ∼ to perform a reliable die-to-package interconnect is becoming a challenge. Further, the high pressure from Cu wire bonding and high reflow temperature of conventional flip-chip bonding often results in damage of device structure. A new flip-chip bonding technology has been developed for such critical applications, and is claimed to be “damage free”. It uses soft bump made by non-full cured conductive paste on the package substrate. These soft bumps require ultra-low bonding pressure on the pad of the die. Thus the bonding process don't make any damage on ULK isolation layer. Details of the process, material sets used for such fragile device structures have been discussed. Reliability results are shared, which further ensures the robustness of this process. Finally, the cost advantage through adaptation of this process has also been elaborated.


2002 ◽  
Vol 124 (4) ◽  
pp. 397-402 ◽  
Author(s):  
C. W. Tang ◽  
Y. C. Chan ◽  
K. C. Hung ◽  
P. L. Tu

Flip chip is the emerging interconnect technology for the next generation of high performance electronics. To eliminate the process bottlenecks associated with flip chip assembly, a new assembly technique based around “No-flow” underfill formulations has been proposed. In this paper, we have studied the correlation between the mechanical strength and the curing condition of no-flow flip chip assemblies using six different reflow profiles. It is found that both Ni3Sn4 and Cu6Sn5 intermetallics (IMCs) are formed at the solder/substrate pad and UBM (Under Bump Metallization)/solder interfaces respectively. The thickness of both IMCs increase with the increasing heating factor. The characteristics of the mechanical strength of these IMCs have been demonstrated. A correlation between the mechanical strength and the interfacial metallurgical reaction has been discussed. Also, the fastest possible reflow profile for both the cure of the underfill and maximizing the shear strength is identified. Based on the observed relationship of the mechanical strength and underfill curing of no-flow flip chip assemblies with Qn, the reflow profile should be controlled with caution in order to optimize both the mechanical strength and time for underfill cure. Only a clearer understanding of these correlation can allow manufacturers to develop a optimal, high reliable, low cost, high throughput no-flow flip chip assembly process.


1991 ◽  
Vol 02 (04) ◽  
pp. 251-261 ◽  
Author(s):  
K.L. TAI

Multichip Module (MCM) packaging has been used in high-end systems, such as mainframe and supercomputers for some time. Rapid advances in VLSI technology and novel system architecture concepts have presented both challenges and opportunities for MCM technologists. We should not just try to find a solution, but also try to take a long-term view and plan the technological development. We would like to develop MCM technology which has a broad range of applications from consumer products to supercomputers. The technology should focus on low cost, high performance, compact size, and high reliability. We believe that it is most attractive to leverage IC technology and surface mount technology (SMT). Therefore we select Si wafer as the substrate, Al as the metallization, polyimide as the dielectrics, Ta-Si as the resistor material, and Si oxide and nitride as the dielectrics for capacitor. Flip-chip solder attachment are used to assemble chips on the substrate. We view our version of MCM as a “giant chip” rather than a miniaturized printed wiring board. This “giant chip” contains mixed device technologies which cannot be obtained by current device technology. The migration path should be from small to large module. The infrastructure of the CAD system and the testing system is critical for the development of MCM technology. Potential applications and implementations of MCM technology are given in this paper.


1991 ◽  
Vol 9 (9) ◽  
pp. 1200-1207 ◽  
Author(s):  
O. Wada ◽  
M. Makiuchi ◽  
H. Hamaguchi ◽  
T. Kumai ◽  
T. Mikawa

Author(s):  
Nokibul Islam ◽  
Miguel Jimarez ◽  
Ahmer Syed ◽  
TaeKyeong Hwang ◽  
JaeYun Gim ◽  
...  

Flip Chip (FC) technology has now become the mainstream solution for high performance packages. From commercial gaming machines to high reliability servers, the FC package is gaining more market share over traditional packaging technologies, such as wire bond. Extensive research has been carried out to make the flip chip more robust, smaller foot prints, and excellent performance. FC packages are fabricated typically in two main configurations. Bare die FC packages leave the non active side of the die exposed. This allows the customer to apply their preferred heat dissipation scheme during board level attach. Lidded FC packages use a metallic lid attached to the die. Bare die package can be further subdivided into bare die underfilled package and bare die flip chip molded ball grid array (FCmBGA) package. Each of these packaging configurations has advantages as well as disadvantages. FCmBGA uses molding compound or EMC instead of capillary underfill, to protect FC die, and eliminate the need for a lid. Package warpage reduced a lot by adding a lid with the bare die FC package. However, the package and board level reliability for the above package types are still debatable. In this study test vehicles with three package types with bumps and BGAs are daisy chain to measure in situ data during accelerated tests. Impact of standard vs. low CTE (coefficient of thermal expansion) core substrate, accelerated temperature cycle conditions (temperature cycle condition “B”, “H”, and “J” according to JEDEC), and package level vs. package mounted on the board level reliability will be investigated. Comprehensive reliability data will help to select the right package type for next generation large die large body flip chip application.


Author(s):  
Gwee Hoon Yen ◽  
Ng Kiong Kay

Abstract Today, failure analysis involving flip chip [1] with copper pillar bump packaging technologies would be the major challenges faced by analysts. Most often, handling on the chips after destructive chemical decapsulation is extremely critical as there are several failure analysis steps to be continued such as chip level fault localization, chip micro probing for fault isolation, parallel lapping [2, 3, 4] and passive voltage contrast. Therefore, quality of sample preparation is critical. This paper discussed and demonstrated a quick, reliable and cost effective methodology to decapsulate the thin small leadless (TSLP) flip chip package with copper pillar (CuP) bump interconnect technology.


2021 ◽  
Vol 6 (51) ◽  
pp. eaaz5796
Author(s):  
I. D. Sîrbu ◽  
G. Moretti ◽  
G. Bortolotti ◽  
M. Bolignari ◽  
S. Diré ◽  
...  

Future robotic systems will be pervasive technologies operating autonomously in unknown spaces that are shared with humans. Such complex interactions make it compulsory for them to be lightweight, soft, and efficient in a way to guarantee safety, robustness, and long-term operation. Such a set of qualities can be achieved using soft multipurpose systems that combine, integrate, and commute between conventional electromechanical and fluidic drives, as well as harvest energy during inactive actuation phases for increased energy efficiency. Here, we present an electrostatic actuator made of thin films and liquid dielectrics combined with rigid polymeric stiffening elements to form a circular electrostatic bellow muscle (EBM) unit capable of out-of-plane contraction. These units are easy to manufacture and can be arranged in arrays and stacks, which can be used as a contractile artificial muscle, as a pump for fluid-driven soft robots, or as an energy harvester. As an artificial muscle, EBMs of 20 to 40 millimeters in diameter can exert forces of up to 6 newtons, lift loads over a hundred times their own weight, and reach contractions of over 40% with strain rates over 1200% per second, with a bandwidth over 10 hertz. As a pump driver, these EBMs produce flow rates of up to 0.63 liters per minute and maximum pressure head of 6 kilopascals, whereas as generator, they reach a conversion efficiency close to 20%. The compact shape, low cost, simple assembling procedure, high reliability, and large contractions make the EBM a promising technology for high-performance robotic systems.


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