(Invited) Cu Surface Passivation with Self-Assembled Monolayer (SAM) and Its Application for Wafer Bonding at Moderately Low Temperature

2013 ◽  
Vol 50 (7) ◽  
pp. 115-123 ◽  
Author(s):  
C. S. Tan ◽  
D. F. Lim
2004 ◽  
Vol 15 (4) ◽  
pp. S137-S141 ◽  
Author(s):  
Satoshi Wakamatsu ◽  
Shintaro Fujii ◽  
Uichi Akiba ◽  
Masamichi Fujihira

2017 ◽  
Vol 57 (2S1) ◽  
pp. 02BB01 ◽  
Author(s):  
Weixin Fu ◽  
Bo Ma ◽  
Hiroyuki Kuwae ◽  
Shuichi Shoji ◽  
Jun Mizuno

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