Wavelength Dependence Of Boron Doping In Silicon Photochemical Vapor Deposition

1990 ◽  
Author(s):  
Satoru Watanabe ◽  
Tatsuya Yamazaki ◽  
Takashi Ito
Keyword(s):  
Vapor Deposition ◽  
Boron Doping ◽  
Wavelength Dependence ◽  
Photochemical Vapor Deposition

Preparation and properties of microcrystalline silicon films using photochemical vapor deposition

1983 ◽  
Vol 59-60 ◽  
pp. 715-718 ◽  
Author(s):  
Tadashi Saitoh ◽  
Toshikazu Shimada ◽  
Masataka Migitaka ◽  
Yasuo Tarui
Keyword(s):  
Vapor Deposition ◽  
Silicon Films ◽  
Microcrystalline Silicon ◽  
Photochemical Vapor Deposition

Photochemical vapor deposition of titaniumdiboride

1990 ◽  
Vol 46 (1-4) ◽  
pp. 215-219 ◽  
Author(s):  
J. Elders ◽  
D. Bebelaar ◽  
J.D.W. van Voorst
Keyword(s):  
Vapor Deposition ◽  
Photochemical Vapor Deposition

Epitaxial growth of Ge films on GaAs (285–415 °C) by laser photochemical vapor deposition

1988 ◽  
Vol 52 (20) ◽  
pp. 1710-1712 ◽  
Author(s):  
V. Tavitian ◽  
C. J. Kiely ◽  
D. B. Geohegan ◽  
J. G. Eden
Keyword(s):  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Photochemical Vapor Deposition
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