Proximity effect correction using multilevel area density maps for character projection based electron beam direct writing toward 14 nm node and beyond

2012 ◽  
Author(s):  
Kozo Ogino ◽  
Hiromi Hoshino ◽  
Takashi Maruyama ◽  
Yasuhide Machida ◽  
Shinji Sugatani
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Direct Writing ◽  
Area Density ◽  
Density Maps ◽  
Proximity Effect Correction

Fabrication of Si photonic waveguides by electron beam lithography using improved proximity effect correction

2020 ◽  
Vol 59 (12) ◽  
pp. 126502
Author(s):  
Moataz Eissa ◽  
Takuya Mitarai ◽  
Tomohiro Amemiya ◽  
Yasuyuki Miyamoto ◽  
Nobuhiko Nishiyama
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Electron Beam Lithography ◽  
Photonic Waveguides ◽  
Proximity Effect Correction
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