Proximity-effect correction for EPL by using multiple pattern-area-density maps and pattern classification

2003 ◽  
Author(s):  
Fumio Murai ◽  
Hiroshi Fukuda ◽  
Shigeki Mori ◽  
Akio Sato ◽  
Kyoji Nakajo
Keyword(s):  
Pattern Classification ◽  
Proximity Effect ◽  
Area Density ◽  
Density Maps ◽  
Proximity Effect Correction

Proximity effect correction using pattern shape modification and area density map

2000 ◽  
Vol 18 (6) ◽  
pp. 3150 ◽  
Author(s):  
Kimitoshi Takahashi ◽  
Morimi Osawa ◽  
Masami Sato ◽  
Hiroshi Arimoto ◽  
Kozo Ogino ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Shape Modification ◽  
Area Density ◽  
Pattern Shape ◽  
Density Map ◽  
Proximity Effect Correction

Application of Proximity Effect Correction Using Pattern-Area Density to Patterning on a Heavy-Metal Substrate and the Cell-Projection Exposure

1994 ◽  
Vol 33 (Part 1, No. 12B) ◽  
pp. 6946-6952 ◽  
Author(s):  
Takeshi Fujino ◽  
Hiroshi Maeda ◽  
Koichi Moriizumi ◽  
Takaaki Kato ◽  
Natsuro Tsubouchi
Keyword(s):  
Heavy Metal ◽  
Proximity Effect ◽  
Metal Substrate ◽  
Area Density ◽  
Proximity Effect Correction

Fabrication of Si photonic waveguides by electron beam lithography using improved proximity effect correction

2020 ◽  
Vol 59 (12) ◽  
pp. 126502
Author(s):  
Moataz Eissa ◽  
Takuya Mitarai ◽  
Tomohiro Amemiya ◽  
Yasuyuki Miyamoto ◽  
Nobuhiko Nishiyama
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Electron Beam Lithography ◽  
Photonic Waveguides ◽  
Proximity Effect Correction

Proximity effect correction for reticle fabrication

2000 ◽  
Author(s):  
Masao Sugiyama ◽  
Shinji Kubo ◽  
Koji Hiruta ◽  
Takayuki Iwamatsu ◽  
Tatsuya Fujisawa ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Proximity Effect Correction
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