scholarly journals Realization of two-dimensional air-bridge silicon photonic crystals by focused ion beam, milling and nanopolishing

2006 ◽  
Author(s):  
Wico C. L. Hopman ◽  
René M. de Ridder ◽  
Shankar Selvaraja ◽  
Cazimir G. Bostan ◽  
Vishwas J. Gadgil ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Two Dimensional ◽  
Silicon Photonic ◽  
Focused Ion Beam Milling

Processing of photonic crystals in InP membranes by focused ion beam milling and plasma etching

2013 ◽  
Vol 102 ◽  
pp. 25-28 ◽  
Author(s):  
Thomas Kusserow ◽  
Matthias Wulf ◽  
Ricardo Zamora ◽  
Kelash Kanwar ◽  
Hartmut Hillmer
Keyword(s):  
Photonic Crystals ◽  
Plasma Etching ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

TWO-DIMENSIONAL ORDERED POROUS STRUCTURES FOR PHOTONIC CRYSTALS OBTAINED USING DEEP ANODIC ETCHING AND FOCUSED ION BEAM TECHNIQUES

2004 ◽  
Vol 03 (01n02) ◽  
pp. 81-85
Author(s):  
E. Yu. GAVRILIN ◽  
Yu. B. GORBATOV ◽  
V. V. STARKOV ◽  
A. F. VYATKIN
Keyword(s):  
Photonic Crystals ◽  
Plasma Etching ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Visible Region ◽  
Two Dimensional ◽  
Porous Structures ◽  
Ordered Structure ◽  
Anodic Etching ◽  
Ordered Porous

Photonic crystals are the very promising novel materials for micro- and nanophotonics for visible region. To produce photonic crystals for this region of light, artificial structures with characteristic sizes less than 1 μm have to be manufactured. Electrochemical deep anodic etching and plasma etching techniques is normally used to produce such structures in silicon wafers. However, standard way of deep anodic etching realization is not suitable for sub-micrometer porous silicon formation. In the present work combination of the deep anodic etching and focused ion beam techniques is used to produce ordered structure of macropores in silicon.

Two‐Dimensional Profile Simulation of Focused Ion‐Beam Milling of LSI

1990 ◽  
Vol 137 (3) ◽  
pp. 983-988 ◽  
Author(s):  
Fumikazu Itoh ◽  
Akira Shimase ◽  
Satoshi Haraichi
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Two Dimensional ◽  
Focused Ion Beam Milling

scholarly journals A streamlined workflow for automated cryo focused ion beam milling

2021 ◽  
pp. 107743
Author(s):  
Sebastian Tacke ◽  
Philipp Erdmann ◽  
Zhexin Wang ◽  
Sven Klumpe ◽  
Michael Grange ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling
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