Investigation of etching two-dimensional microhole lattice array on lithium niobate with focused ion beam for fabricating photonic crystals

2009 ◽  
Vol 27 (4) ◽  
pp. 1851 ◽  
Author(s):  
Xuefeng Xu ◽  
Sha Yan ◽  
Jianming Xue ◽  
Yugang Wang ◽  
Keming Wang ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Photonic Crystals ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Two Dimensional

TWO-DIMENSIONAL ORDERED POROUS STRUCTURES FOR PHOTONIC CRYSTALS OBTAINED USING DEEP ANODIC ETCHING AND FOCUSED ION BEAM TECHNIQUES

2004 ◽  
Vol 03 (01n02) ◽  
pp. 81-85
Author(s):  
E. Yu. GAVRILIN ◽  
Yu. B. GORBATOV ◽  
V. V. STARKOV ◽  
A. F. VYATKIN
Keyword(s):  
Photonic Crystals ◽  
Plasma Etching ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Visible Region ◽  
Two Dimensional ◽  
Porous Structures ◽  
Ordered Structure ◽  
Anodic Etching ◽  
Ordered Porous

Photonic crystals are the very promising novel materials for micro- and nanophotonics for visible region. To produce photonic crystals for this region of light, artificial structures with characteristic sizes less than 1 μm have to be manufactured. Electrochemical deep anodic etching and plasma etching techniques is normally used to produce such structures in silicon wafers. However, standard way of deep anodic etching realization is not suitable for sub-micrometer porous silicon formation. In the present work combination of the deep anodic etching and focused ion beam techniques is used to produce ordered structure of macropores in silicon.

scholarly journals Realization of two-dimensional air-bridge silicon photonic crystals by focused ion beam, milling and nanopolishing

2006 ◽  
Author(s):  
Wico C. L. Hopman ◽  
René M. de Ridder ◽  
Shankar Selvaraja ◽  
Cazimir G. Bostan ◽  
Vishwas J. Gadgil ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Two Dimensional ◽  
Silicon Photonic ◽  
Focused Ion Beam Milling

Growth of isolated domains induced by focused ion beam irradiation in congruent lithium niobate

2017 ◽  
Vol 508 (1) ◽  
pp. 16-25 ◽  
Author(s):  
D. S. Chezganov ◽  
E. O. Vlasov ◽  
L.V. Gimadeeva ◽  
D. O. Alikin ◽  
M. A. Chuvakova ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Congruent Lithium Niobate

Two-dimensional ordered growth of InAs nanowires assisted by randomly deposited silver nanoparticles on a topographically modified surface by a focused ion beam

2019 ◽  
Vol 493 ◽  
pp. 271-278
Author(s):  
R. Ribeiro-Andrade ◽  
T.L. Vasconcelos ◽  
R.M.S. Kawabata ◽  
M.P. Pires ◽  
P.L. Souza ◽  
...  
Keyword(s):  
Silver Nanoparticles ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Two Dimensional ◽  
Inas Nanowires ◽  
Modified Surface

Deeply etched two-dimensional photonic crystals fabricated on GaAs/AlGaAs slab waveguides by using chemically assisted ion beam etching

2002 ◽  
Vol 61-62 ◽  
pp. 875-880 ◽  
Author(s):  
K. Avary ◽  
J.P. Reithmaier ◽  
F. Klopf ◽  
T. Happ ◽  
M. Kamp ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Ion Beam ◽  
Two Dimensional ◽  
Ion Beam Etching ◽  
Slab Waveguides
Sign in / Sign up

Export Citation Format

Share Document