Two‐Dimensional Profile Simulation of Focused Ion‐Beam Milling of LSI

1990 ◽  
Vol 137 (3) ◽  
pp. 983-988 ◽  
Author(s):  
Fumikazu Itoh ◽  
Akira Shimase ◽  
Satoshi Haraichi
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Two Dimensional ◽  
Focused Ion Beam Milling

scholarly journals Realization of two-dimensional air-bridge silicon photonic crystals by focused ion beam, milling and nanopolishing

2006 ◽  
Author(s):  
Wico C. L. Hopman ◽  
René M. de Ridder ◽  
Shankar Selvaraja ◽  
Cazimir G. Bostan ◽  
Vishwas J. Gadgil ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Two Dimensional ◽  
Silicon Photonic ◽  
Focused Ion Beam Milling

scholarly journals A streamlined workflow for automated cryo focused ion beam milling

2021 ◽  
pp. 107743
Author(s):  
Sebastian Tacke ◽  
Philipp Erdmann ◽  
Zhexin Wang ◽  
Sven Klumpe ◽  
Michael Grange ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

Addressable Metal-Ferroelectric-Metal Nanocapacitor Arrays Fabricated by Focused Ion Beam Milling

2012 ◽  
Vol 132 (1) ◽  
pp. 99-106
Author(s):  
Ying Dai ◽  
Lei Yang ◽  
Longhai Wang ◽  
Bin Tian ◽  
Lianying Zou ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

A study of angular effects in focused ion beam milling of water ice

2008 ◽  
Vol 18 (9) ◽  
pp. 095010 ◽  
Author(s):  
Jing Fu ◽  
Sanjay B Joshi ◽  
Jeffrey M Catchmark
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Water Ice ◽  
Focused Ion Beam Milling

Properties of Individually Addressable Ferroelectric Nanocapacitor Arrays Fabricated by Focused Ion Beam Milling

2013 ◽  
Vol 13 (8) ◽  
pp. 5542-5546 ◽  
Author(s):  
Ying Dai ◽  
Lei Yang ◽  
Longhai Wang ◽  
Lianying Zou ◽  
Bin Tian ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

Quantitative off-axis electron holography of GaAsp-njunctions prepared by focused ion beam milling

2009 ◽  
Vol 233 (1) ◽  
pp. 102-113 ◽  
Author(s):  
D. COOPER ◽  
R. TRUCHE ◽  
A.C. TWITCHETT-HARRISON ◽  
R.E. DUNIN-BORKOWSKI ◽  
P.A. MIDGLEY
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Electron Holography ◽  
Focused Ion Beam Milling
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