Positive and negative tone double patterning lithography for 50nm flash memory
2009 ◽
Vol 22
(5)
◽
pp. 635-640
◽
2012 ◽
Vol E95.C
(5)
◽
pp. 837-841
◽
2020 ◽
Vol E103.C
(4)
◽
pp. 171-180