Process parameter influence to negative tone development process for double patterning

2010 ◽  
Author(s):  
Shinji Tarutani ◽  
Sou Kamimura ◽  
Jiro Yokoyama
Keyword(s):  
Development Process ◽  
Process Parameter ◽  
Double Patterning ◽  
Negative Tone ◽  
Parameter Influence

Analysis of laser cladding process parameter influence on the clad bead geometry

2017 ◽  
Vol 61 (5) ◽  
pp. 883-891 ◽  
Author(s):  
Dara Moazami Goodarzi ◽  
Joonas Pekkarinen ◽  
Antti Salminen
Keyword(s):  
Laser Cladding ◽  
Process Parameter ◽  
Bead Geometry ◽  
Laser Cladding Process ◽  
Parameter Influence

scholarly journals Materials and Processes of Negative Tone Development for Double Patterning Process

2009 ◽  
Vol 22 (5) ◽  
pp. 635-640 ◽  
Author(s):  
Shinji Tarutani ◽  
Hideaki Tsubaki ◽  
Sou Kamimura
Keyword(s):  
Double Patterning ◽  
Negative Tone

Negative tone development process for ArF immersion extension

2014 ◽  
Author(s):  
Kosuke Koshijima ◽  
Michihiro Shirakawa ◽  
So Kamimura ◽  
Keita Katou
Keyword(s):  
Development Process ◽  
Negative Tone

Developer effect on the negative tone development process under low NILS conditions

2011 ◽  
Author(s):  
Young C. Bae ◽  
Seung-Hyun Lee ◽  
Rosemary Bell ◽  
Lori Joesten ◽  
George G. Barclay
Keyword(s):  
Development Process ◽  
Negative Tone

Resist material for negative tone development process

2010 ◽  
Author(s):  
Shinji Tarutani ◽  
Sou Kamimura ◽  
Yuuichiro Enomoto ◽  
Keita Katou
Keyword(s):  
Development Process ◽  
Negative Tone

scholarly journals Process parameter influence on texture heterogeneity in asymmetric rolling of aluminium sheet alloys

2016 ◽  
Vol 11 (2) ◽  
pp. 297-309 ◽  
Author(s):  
Diarmuid Shore ◽  
Leo A.I. Kestens ◽  
Jurij Sidor ◽  
Paul Van Houtte ◽  
Albert Van Bael
Keyword(s):  
Process Parameter ◽  
Asymmetric Rolling ◽  
Aluminium Sheet ◽  
Parameter Influence
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