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Illumination, acid diffusion, and process optimization considerations for 193-nm contact hole resists
Mapping Intimacies
◽
10.1117/12.474214
◽
2002
◽
Author(s):
Takanori Kudo
◽
Eric L. Alemy
◽
Ralph R. Dammel
◽
Woo-Kyu Kim
◽
Sang-Ho Lee
◽
...
Keyword(s):
Process Optimization
◽
Acid Diffusion
◽
193 Nm
Download Full-text
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10.1117/12.388267
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2000
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Plasma polymerized methylsilane. III. Process optimization for 193 nm lithography applications
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
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10.1116/1.591278
◽
2000
◽
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pp. 793
◽
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◽
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◽
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◽
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Process optimization of a negative-tone CVD photoresist for 193-nm lithography applications
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◽
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◽
Author(s):
Olivier P. Joubert
◽
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◽
Cedric Monget
◽
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◽
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Keyword(s):
Process Optimization
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Negative Tone
◽
193 Nm
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Immersion system process optimization for 248-nm and 193-nm photomasks: binary and EAPSM
10.1117/12.518247
◽
2003
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◽
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◽
James L. Wood
◽
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Process Optimization
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Acid diffusion characteristics of RELACS coating for 193-nm lithography
10.1117/12.534612
◽
2004
◽
Cited By ~ 3
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◽
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◽
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Kiyohisa Takahashi
◽
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...
Keyword(s):
Acid Diffusion
◽
Diffusion Characteristics
◽
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Review for "Process optimization of high entropy alloys by laser additive manufacturing"
10.1002/eng2.12252/v2/review2
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2020
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Author(s):
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Process Optimization
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Decision letter for "Process optimization of high entropy alloys by laser additive manufacturing"
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2020
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Keyword(s):
Additive Manufacturing
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High Entropy Alloys
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Laser Additive Manufacturing
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High Entropy
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Review for "Process optimization of high entropy alloys by laser additive manufacturing"
10.1002/eng2.12252/v1/review4
◽
2020
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Author(s):
Li Jiang
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Additive Manufacturing
◽
Process Optimization
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High Entropy Alloys
◽
Laser Additive Manufacturing
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BOF Process Optimization and Technology Improvements at Ternium Brazil
AISTech2019 Proceedings of the Iron and Steel Technology Conference
◽
10.33313/377/094
◽
2019
◽
Author(s):
D. Demuner
◽
H. de Carvalho
◽
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◽
M. Viana Jr.
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Process Optimization
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Process Optimization of Preparation of Enterosorbents of Birch Bark Bast
Химия в интересах устойчивого развития
◽
10.15372/khur20170302
◽
2017
◽
Keyword(s):
Process Optimization
◽
Birch Bark
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