193-nm thin-layer imaging performance of 140-nm contact hole patterning and DOE dry development process optimization of multilayer resist process

Author(s):  
Won D. Kim ◽  
Sung-Bo Hwang ◽  
Georgia K. Rich ◽  
Victoria L. Graffenberg
2009 ◽  
Author(s):  
Carlos Fonseca ◽  
Mark Somervell ◽  
Steven Scheer ◽  
Wallace Printz ◽  
Kathleen Nafus ◽  
...  

2004 ◽  
Author(s):  
Hyung-Rae Lee ◽  
Jangho Shin ◽  
Hyun-Woo Kim ◽  
Sang-Gyun Woo ◽  
Han-Ku Cho ◽  
...  

2021 ◽  
Vol 13 (5) ◽  
pp. 755-770
Author(s):  
Jeong Ho Choi ◽  
Jong Tak Jang ◽  
Chan Young Park ◽  
Soung Hee Yun ◽  
Won Hee Jo ◽  
...  

The post-combustion capture (PCC) process using amines is one of the most representative technologies for separating CO2 from huge CO2 emisions. However, the achievement of reasonable costs for capturing CO2 requires continuous studies on absorbent development, process optimization, and energy saving. Among these, the absorbent development is the most essential factor in reducing the operating cost and equipment cost of the PCC process. In this study, piperidine (PD) solution is used as an alternative absorbent to overcome the disadvantage of commercial monoethanolamine (MEA) solution. The absorption rate, absorption capacity and regeneration energy of PD solution were measured to confirm its performance as an alternative absorbent. It was found that PD solution shows key advantages, compared with MEA solution. First, the overall mass transfer of CO2 in PD solution was 2.69 times faster than in MEA solution at 313 K. Second, PD solution was capable of absorbing 1.5 times more of CO2 than MEA solution. Third, the reboiler heat duty of PD solution showed 1.16 times better energy-efficiency than that of MEA because the sensible heat of PD was 75.8 kJ·mol−1 lower than that of MEA. From these results, PD solution is deemed to be a good alternative absorbent to replace MEA solution.


1999 ◽  
Author(s):  
Olivier P. Joubert ◽  
D. Fuard ◽  
Cedric Monget ◽  
Patrick Schiavone ◽  
Olivier Toublan ◽  
...  

2003 ◽  
Author(s):  
Gim Chen ◽  
Julio Reyes ◽  
James L. Wood ◽  
Ismail Kashkoush ◽  
Laurent Dieu ◽  
...  

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