multilayer resist
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Development of Spin-on Carbon Materials with High Planarization Performance for Multilayer Resist Process

2020 ◽  
Author(s):  
Keisuke Kawashima ◽  
Koji Inoue ◽  
Kenichi Fujii ◽  
Takashi Oda ◽  
Kazuo Kohmura
Keyword(s):  
Carbon Materials ◽  
Multilayer Resist

Multilayer Resist Technology

2007 ◽  
pp. 637-674
Author(s):  
Maureen Hanratty ◽  
Bruce Smith
Keyword(s):  
Multilayer Resist

Development of Multilayer Resist Technology for Halftone Mask in Liquid Crystal Display Manufacturing

2006 ◽  
Vol 45 (10A) ◽  
pp. 7949-7960 ◽  
Author(s):  
Hideo Horibe ◽  
Tomokazu Ichikawa ◽  
Shinya Takamatsu
Keyword(s):  
Liquid Crystal ◽  
Liquid Crystal Display ◽  
Multilayer Resist

scholarly journals Developments of Multilayer Resist Technology for the Halftone Mask

2005 ◽  
Vol 62 (5) ◽  
pp. 221-227 ◽  
Author(s):  
Hideo HORIBE ◽  
Shinya TAKAMATSU ◽  
Tomokazu ICHIKAWA ◽  
Tomosumi KAMIMURA
Keyword(s):  
Multilayer Resist

scholarly journals Changing Behavior of Residue during Dry Etching in Multilayer Resist Process

2005 ◽  
Vol 18 (1) ◽  
pp. 157-163
Author(s):  
Watanabe Keiji ◽  
Suda Shoichi ◽  
Takeda Masayuki ◽  
Nagai Masatoshi
Keyword(s):  
Dry Etching ◽  
Multilayer Resist

scholarly journals A Surface-Silylated Single-Layer Resist Using Chemical Amplification: A New Simpler Alternative for Multilayer Resist System.

2000 ◽  
Vol 13 (4) ◽  
pp. 535-538
Author(s):  
Kazuyuki Sugita ◽  
Masakuni Ikagawa ◽  
Liew Chan Ming ◽  
Masahiro Yamashita ◽  
Kieko Harada ◽  
...  
Keyword(s):  
Single Layer ◽  
Chemical Amplification ◽  
Multilayer Resist

Fabrication of High-Resolution and High-Aspect-Ratio Patterns on a Stepped Substrate by Using Scanning Probe Lithography with a Multilayer-Resist System

1999 ◽  
Vol 38 (Part 1, No. 4B) ◽  
pp. 2445-2447 ◽  
Author(s):  
Masayoshi Ishibashi ◽  
Nami Sugita ◽  
Seiji Heike ◽  
Hiroshi Kajiyama ◽  
Tomihiro Hashizume
Keyword(s):  
High Resolution ◽  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Scanning Probe ◽  
Scanning Probe Lithography ◽  
Multilayer Resist
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