Application of polysilanes for deep-UV antireflective coating

1999 ◽  
Author(s):  
Yasunobu Onishi ◽  
Yasuhiko Sato ◽  
Eishi Shiobara ◽  
Seiro Miyoshi ◽  
Hideto Matsuyama ◽  
...  
Keyword(s):  
Antireflective Coating ◽  
Deep Uv

Top antireflective coating process for deep-UV lithography

1999 ◽  
Author(s):  
Allen C. Fung ◽  
Binder K. Mann ◽  
Ronald J. Eakin ◽  
Pierre Silvestre ◽  
Brad Williams ◽  
...  
Keyword(s):  
Coating Process ◽  
Antireflective Coating ◽  
Uv Lithography ◽  
Deep Uv

Enhancement of deep-UV patterning integrity and process control using antireflective coating

1992 ◽  
Author(s):  
Bruce W. Dudley ◽  
Susan K. Jones ◽  
Charles R. Peters ◽  
David A. Koester ◽  
Gregg A. Barnes ◽  
...  
Keyword(s):  
Process Control ◽  
Antireflective Coating ◽  
Deep Uv

Deep-UV antireflective coating: ellipsometry and XPS characterization

2000 ◽  
Vol 30 (1) ◽  
pp. 531-533 ◽  
Author(s):  
X. Boddaert ◽  
A. Caramante ◽  
E. Josse ◽  
B. Delahaye
Keyword(s):  
Antireflective Coating ◽  
Xps Characterization ◽  
Deep Uv

Inorganic antireflective coating process for deep-UV lithography

1998 ◽  
Author(s):  
Qizhi He ◽  
Wei W. Lee ◽  
Maureen A. Hanratty ◽  
Daty Rogers ◽  
Guoqiang Xing ◽  
...  
Keyword(s):  
Coating Process ◽  
Antireflective Coating ◽  
Uv Lithography ◽  
Deep Uv

Development of Silicon Wafer Packaging Technology for Deep UV LED

2020 ◽  
Vol 140 (7) ◽  
pp. 152-157
Author(s):  
Hirofumi Chiba ◽  
Yukio Suzuki ◽  
Yoshiaki Yasuda ◽  
Mitsuyasu Kumagai ◽  
Takaaki Koyama ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Packaging Technology ◽  
Uv Led ◽  
Deep Uv

PULSED UV IRRADIATION USING DEEP UV-LED FOR INACTIVATION OF ESCHERICHIA COLI

2019 ◽  
Vol 75 (7) ◽  
pp. III_91-III_96
Author(s):  
Tomoyasu SADO ◽  
Kumiko OGUMA ◽  
Takashi HASHIMOTO ◽  
Shinobu KAZAMA ◽  
Satoshi TAKIZAWA
Keyword(s):  
Escherichia Coli ◽  
Uv Irradiation ◽  
Uv Led ◽  
Deep Uv

Deep-UV emission at 260 nm from MBE-grown AlGaN/AlN quantum-well structures

2019 ◽  
Vol 512 ◽  
pp. 213-218 ◽  
Author(s):  
Wenxian Yang ◽  
Yukun Zhao ◽  
Yuanyuan Wu ◽  
Xuefei Li ◽  
Zhiwei Xing ◽  
...  
Keyword(s):  
Quantum Well ◽  
Quantum Well Structures ◽  
Uv Emission ◽  
Deep Uv

High-resolution deep-UV laser mask repair based on near-field optical technology

1996 ◽  
Author(s):  
Klony S. Lieberman ◽  
Hanan Terkel ◽  
Michael Rudman ◽  
A. Ignatov ◽  
Aaron Lewis
Keyword(s):  
High Resolution ◽  
Near Field ◽  
Uv Laser ◽  
Optical Technology ◽  
Deep Uv
Sign in / Sign up

Export Citation Format

Share Document