Enhancement of deep-UV patterning integrity and process control using antireflective coating

1992 ◽  
Author(s):  
Bruce W. Dudley ◽  
Susan K. Jones ◽  
Charles R. Peters ◽  
David A. Koester ◽  
Gregg A. Barnes ◽  
...  
Keyword(s):  
Process Control ◽  
Antireflective Coating ◽  
Deep Uv

Application of polysilanes for deep-UV antireflective coating

1999 ◽  
Author(s):  
Yasunobu Onishi ◽  
Yasuhiko Sato ◽  
Eishi Shiobara ◽  
Seiro Miyoshi ◽  
Hideto Matsuyama ◽  
...  
Keyword(s):  
Antireflective Coating ◽  
Deep Uv

Top antireflective coating process for deep-UV lithography

1999 ◽  
Author(s):  
Allen C. Fung ◽  
Binder K. Mann ◽  
Ronald J. Eakin ◽  
Pierre Silvestre ◽  
Brad Williams ◽  
...  
Keyword(s):  
Coating Process ◽  
Antireflective Coating ◽  
Uv Lithography ◽  
Deep Uv

Deep-UV antireflective coating: ellipsometry and XPS characterization

2000 ◽  
Vol 30 (1) ◽  
pp. 531-533 ◽  
Author(s):  
X. Boddaert ◽  
A. Caramante ◽  
E. Josse ◽  
B. Delahaye
Keyword(s):  
Antireflective Coating ◽  
Xps Characterization ◽  
Deep Uv

Inorganic antireflective coating process for deep-UV lithography

1998 ◽  
Author(s):  
Qizhi He ◽  
Wei W. Lee ◽  
Maureen A. Hanratty ◽  
Daty Rogers ◽  
Guoqiang Xing ◽  
...  
Keyword(s):  
Coating Process ◽  
Antireflective Coating ◽  
Uv Lithography ◽  
Deep Uv

INSTRUMENTATION - Mass Spectrometry Process Control

1956 ◽  
Vol 48 (2) ◽  
pp. 81-84
Author(s):  
William Priestley ◽  
B. Dudenbostel, Jr.
Keyword(s):  
Mass Spectrometry ◽  
Process Control
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