High-resolution deep-UV laser mask repair based on near-field optical technology

Author(s):  
Klony S. Lieberman ◽  
Hanan Terkel ◽  
Michael Rudman ◽  
A. Ignatov ◽  
Aaron Lewis
2011 ◽  
Vol 21 (5) ◽  
pp. 054007 ◽  
Author(s):  
F Brandi ◽  
F Anjum ◽  
L Ceseracciu ◽  
A C Barone ◽  
A Athanassiou
Keyword(s):  
Uv Laser ◽  

1995 ◽  
Author(s):  
John W. Herman ◽  
Yung-Ho Chuang ◽  
Baorui Yang ◽  
Minchuan Wang ◽  
Stephen P. Palese

2002 ◽  
Vol 33 (9) ◽  
pp. 730-739 ◽  
Author(s):  
H. S. Sands ◽  
F. Demangeot ◽  
E. Bonera ◽  
S. Webster ◽  
R. Bennett ◽  
...  
Keyword(s):  
Uv Laser ◽  

Author(s):  
Jiang Li ◽  
Zhu Wang ◽  
Yue Ma ◽  
Xuehong Ran ◽  
Honggang Hao
Keyword(s):  

2009 ◽  
Vol 4 (4) ◽  
pp. 210-214 ◽  
Author(s):  
J.K. Chua ◽  
V.M. Murukeshan
Keyword(s):  

2016 ◽  
Vol 18 (14) ◽  
pp. 9405-9411 ◽  
Author(s):  
C. Awada ◽  
J. Plathier ◽  
C. Dab ◽  
F. Charra ◽  
L. Douillard ◽  
...  

The need for a dedicated spectroscopic technique with nanoscale resolution to characterize SERS substrates pushed us to develop a proof of concept of a functionalized tip–surface enhanced Raman scattering (FTERS) technique.


2007 ◽  
Vol 17 (04) ◽  
pp. 689-695
Author(s):  
ANNA V. SHARIKOVA ◽  
DENNIS K. KILLINGER

We have conducted studies of deep UV laser-induced fluorescence (LIF) for the reagentless detection of trace species and Dissolved Organic Compounds (DOC's) in water. Our LIF detection system had two interchangeable UV lasers, 266 nm and 355 nm, illuminating a flow cell containing a water sample. The fluorescence emitted at 90 degrees to the laser beam was collected by focusing optics, passed through cut-off and interference filters with 21 optical bandpass channels (240–680 nm ), and detected by a photomultiplier tube (PMT). The samples analyzed by the system included bottled, tap and river water; we have also worked with biological and chemical species (Bacillus Globigii, malathion). In terms of the excitation wavelength, it was observed that the deep UV excitation resulted in spectra that contained more features, and had better separation of the LIF from the Raman peak, thus enhancing the detection of unique spectral features.


2021 ◽  
Author(s):  
G. Apeland ◽  
J. Yuan ◽  
M. Wilk-Lopes ◽  
D. Barlass ◽  
A. Osen ◽  
...  
Keyword(s):  

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