Top antireflective coating process for deep-UV lithography

1999 ◽  
Author(s):  
Allen C. Fung ◽  
Binder K. Mann ◽  
Ronald J. Eakin ◽  
Pierre Silvestre ◽  
Brad Williams ◽  
...  
Keyword(s):  
Coating Process ◽  
Antireflective Coating ◽  
Uv Lithography ◽  
Deep Uv

Inorganic antireflective coating process for deep-UV lithography

1998 ◽  
Author(s):  
Qizhi He ◽  
Wei W. Lee ◽  
Maureen A. Hanratty ◽  
Daty Rogers ◽  
Guoqiang Xing ◽  
...  
Keyword(s):  
Coating Process ◽  
Antireflective Coating ◽  
Uv Lithography ◽  
Deep Uv

scholarly journals Large plasmonic color metasurfaces fabricated by super resolution deep UV lithography

2021 ◽  
Vol 3 (8) ◽  
pp. 2236-2244
Author(s):  
Matthias Keil ◽  
Alexandre Emmanuel Wetzel ◽  
Kaiyu Wu ◽  
Elena Khomtchenko ◽  
Jitka Urbankova ◽  
...  
Keyword(s):  
Super Resolution ◽  
Large Area ◽  
Uv Lithography ◽  
Deep Uv

A novel super resolution deep UV lithography method is employed to fabricate large area plasmonic metasurfaces.

Application of polysilanes for deep-UV antireflective coating

1999 ◽  
Author(s):  
Yasunobu Onishi ◽  
Yasuhiko Sato ◽  
Eishi Shiobara ◽  
Seiro Miyoshi ◽  
Hideto Matsuyama ◽  
...  
Keyword(s):  
Antireflective Coating ◽  
Deep Uv

scholarly journals 193-nm deep-UV lithography system using a line-narrowed ArF excimer laser

1993 ◽  
Author(s):  
Bruce W. Smith ◽  
Malcolm C. Gower ◽  
Mark Westcott ◽  
Lynn F. Fuller
Keyword(s):  
Excimer Laser ◽  
Uv Lithography ◽  
Arf Excimer Laser ◽  
Deep Uv ◽  
193 Nm ◽  
Lithography System

scholarly journals Dual-band fiber-chip grating coupler in a 300 mm silicon-on-insulator platform and 193-nm deep-UV lithography

2020 ◽  
Author(s):  
David Gonzalez-Andrade ◽  
Diego Pérez Galacho ◽  
Miguel Montesinos Ballester ◽  
Xavier LE ROUX ◽  
Eric Cassan ◽  
...  
Keyword(s):  
Silicon On Insulator ◽  
Dual Band ◽  
Grating Coupler ◽  
Uv Lithography ◽  
Deep Uv ◽  
193 Nm

Fabrication of AlGaN/GaN HEMTs with slant field plates by using deep-UV lithography

2012 ◽  
Author(s):  
Ting-En Hsieh ◽  
Lu-Che Huang ◽  
Yueh-Chin Lin ◽  
Chia-Hua Chang ◽  
Huan-Chung Wang ◽  
...  
Keyword(s):  
Uv Lithography ◽  
Gan Hemts ◽  
Deep Uv

Evaluation of aliphatic 2-diazoketones as photoactive compounds for deep-UV lithography

1990 ◽  
Author(s):  
George Schwartzkopf ◽  
Kathleen B. Gabriel ◽  
John B. Covington
Keyword(s):  
Uv Lithography ◽  
Deep Uv

Polysilanes: Solution Photochemistry and Deep-UV Lithography

1989 ◽  
pp. 115-132 ◽  
Author(s):  
R. D. Miller ◽  
G. Wallraff ◽  
N. Clecak ◽  
R. Sooriyakumaran ◽  
J. Michl ◽  
...  
Keyword(s):  
Uv Lithography ◽  
Deep Uv
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