Negative tone development process for ArF immersion extension

2014 ◽  
Author(s):  
Kosuke Koshijima ◽  
Michihiro Shirakawa ◽  
So Kamimura ◽  
Keita Katou
Keyword(s):  
Development Process ◽  
Negative Tone

Developer effect on the negative tone development process under low NILS conditions

2011 ◽  
Author(s):  
Young C. Bae ◽  
Seung-Hyun Lee ◽  
Rosemary Bell ◽  
Lori Joesten ◽  
George G. Barclay
Keyword(s):  
Development Process ◽  
Negative Tone

Resist material for negative tone development process

2010 ◽  
Author(s):  
Shinji Tarutani ◽  
Sou Kamimura ◽  
Yuuichiro Enomoto ◽  
Keita Katou
Keyword(s):  
Development Process ◽  
Negative Tone

Development of new high transmission eaPSM for Negative Tone Development process on wafer

2015 ◽  
Author(s):  
Takashi Adachi ◽  
Ayako Tani ◽  
Yukihiro Fujimura ◽  
Shingo Yoshikawa ◽  
Katsuya Hayano ◽  
...  
Keyword(s):  
Development Process ◽  
High Transmission ◽  
Negative Tone

scholarly journals Effect of Molecular Weights of 193nm Resist Polymers on the Negative Tone Development Process

2011 ◽  
Vol 24 (2) ◽  
pp. 211-217 ◽  
Author(s):  
Young C. Bae ◽  
Seung-Hyun Lee ◽  
Rosemary Bell ◽  
Jong Keun Park ◽  
Thomas Cardolaccia ◽  
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Keyword(s):  
Development Process ◽  
Molecular Weights ◽  
Negative Tone

ArF photoresist polymers with nitrogen or sulfone moieties for negative tone development process

2014 ◽  
Author(s):  
Dong-Gyun Kim ◽  
Su-Jee Kwon ◽  
Suk-Koo Hong ◽  
Joon Je Lee ◽  
Hyung Rae Lee ◽  
...  
Keyword(s):  
Development Process ◽  
Negative Tone

Analysis of overlay errors induced by exposure energy in negative tone development process for photolithography

2014 ◽  
Author(s):  
Young Ha Kim ◽  
Jang-Sun Kim ◽  
Young-Hoon Kim ◽  
Byeong-Ok Cho ◽  
Jinphil Choi ◽  
...  
Keyword(s):  
Development Process ◽  
Negative Tone ◽  
Exposure Energy

PEB to development delay influence on contact patterning by negative tone development process

2013 ◽  
Author(s):  
C. K. Chen ◽  
C. H. Lin ◽  
C. H. Huang ◽  
Elvis Yang ◽  
T. H. Yang ◽  
...  
Keyword(s):  
Development Process ◽  
Development Delay ◽  
Negative Tone

CD uniformity improvement of dense contact array in negative tone development process

2015 ◽  
Author(s):  
Fengnien Tsai ◽  
Teng-hao Yeh ◽  
C. C. Yang ◽  
Elvis Yang ◽  
T. H. Yang ◽  
...  
Keyword(s):  
Development Process ◽  
Negative Tone
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