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2014 ◽  
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Jang-Sun Kim ◽  
Young-Hoon Kim ◽  
Byeong-Ok Cho ◽  
Jinphil Choi ◽  
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Michihiro Shirakawa ◽  
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Developer effect on the negative tone development process under low NILS conditions

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Young C. Bae ◽  
Seung-Hyun Lee ◽  
Rosemary Bell ◽  
Lori Joesten ◽  
George G. Barclay
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Development of new high transmission eaPSM for Negative Tone Development process on wafer

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Development Process ◽  
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scholarly journals Effect of Molecular Weights of 193nm Resist Polymers on the Negative Tone Development Process

2011 ◽  
Vol 24 (2) ◽  
pp. 211-217 ◽  
Author(s):  
Young C. Bae ◽  
Seung-Hyun Lee ◽  
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Jong Keun Park ◽  
Thomas Cardolaccia ◽  
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Keyword(s):  
Development Process ◽  
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2014 ◽  
Author(s):  
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Su-Jee Kwon ◽  
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Development Process ◽  
Development Delay ◽  
Negative Tone

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Keyword(s):  
Development Process ◽  
Negative Tone
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