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2013 ◽  
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Development Delay ◽  
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Negative tone development process for ArF immersion extension

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Developer effect on the negative tone development process under low NILS conditions

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Rosemary Bell ◽  
Lori Joesten ◽  
George G. Barclay
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Resist material for negative tone development process

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Development Process ◽  
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scholarly journals Effect of Molecular Weights of 193nm Resist Polymers on the Negative Tone Development Process

2011 ◽  
Vol 24 (2) ◽  
pp. 211-217 ◽  
Author(s):  
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Seung-Hyun Lee ◽  
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Development Process ◽  
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Keyword(s):  
Development Process ◽  
Negative Tone
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