Line edge roughness measurement technique for fingerprint pattern in block copolymer thin film

2013 ◽  
Author(s):  
Miki Isawa ◽  
Kei Sakai ◽  
Paulina A. Rincon Delgadillo ◽  
Roel Gronheid ◽  
Hiroshi Yoshida
Keyword(s):  
Thin Film ◽  
Block Copolymer ◽  
Measurement Technique ◽  
Line Edge Roughness ◽  
Roughness Measurement ◽  
Edge Roughness ◽  
Fingerprint Pattern

scholarly journals Influence of Additives on the Interfacial Width and Line Edge Roughness in Block Copolymer Lithography

2020 ◽  
Vol 32 (6) ◽  
pp. 2399-2407 ◽  
Author(s):  
Daniel F. Sunday ◽  
Xuanxuan Chen ◽  
Thomas R. Albrecht ◽  
Derek Nowak ◽  
Paulina Rincon Delgadillo ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Line Edge Roughness ◽  
Edge Roughness ◽  
Block Copolymer Lithography ◽  
Copolymer Lithography

Ordering of Self-Assembled Nanodots Improved by Guide Pattern with Low Line Edge Roughness for 5 Tbit/in.2 Patterned Media

2013 ◽  
Vol 596 ◽  
pp. 78-82
Author(s):  
Takuya Komori ◽  
Miftakhul Huda ◽  
Takashi Akahane ◽  
Muneyasu Masuda ◽  
Jing Liu ◽  
...  
Keyword(s):  
Block Copolymer ◽  
High Resolution ◽  
Ammonium Hydroxide ◽  
Line Pattern ◽  
Line Edge Roughness ◽  
Patterned Media ◽  
Tetramethyl Ammonium Hydroxide ◽  
Edge Roughness ◽  
Nanodot Arrays ◽  
Self Assembled

We investigated the possibility of ordering of 12 nm pitced self-assembled nanodots from block copolymer (BCP) improved by the guide pattern with low line edge roughness (LER) for patterned media. We found that LER of the line pattern (σ-value) was reduced by using high-resolution salty development for HSQ resist line pattern fabrication compared with conventional tetramethyl ammonium hydroxide (TMAH) developer. By adopting this development technique to guide pattern fabrication, we demonstrated 10 rows of ordered self-assembled BCP nanodot arrays with a size of 6 nm and a pitch of 12 nm (5 Tbit/in.2) between the guide patterns.

Remediation of Line Edge Roughness in Chemical Nanopatterns by the Directed Assembly of Overlying Block Copolymer Films

2010 ◽  
Vol 43 (5) ◽  
pp. 2334-2342 ◽  
Author(s):  
Mark P. Stoykovich ◽  
Kostas Ch. Daoulas ◽  
Marcus Müller ◽  
Huiman Kang ◽  
Juan J. de Pablo ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Directed Assembly ◽  
Line Edge Roughness ◽  
Copolymer Films ◽  
Edge Roughness
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