Feature-shape and line-edge roughness measurement of deep submicron lithographic structures using small-angle neutron scattering

2001 ◽  
Author(s):  
Eric K. Lin ◽  
Wen-li Wu ◽  
Qinghuang Lin ◽  
Marie Angelopoulos
Keyword(s):  
Neutron Scattering ◽  
Small Angle ◽  
Small Angle Neutron Scattering ◽  
Deep Submicron ◽  
Line Edge Roughness ◽  
Roughness Measurement ◽  
Edge Roughness

Structural characterizaton of deep-submicron lithographic structures using small-angle neutron scattering

2002 ◽  
Author(s):  
Eric K. Lin ◽  
Ronald L. Jones ◽  
Wen-li Wu ◽  
John G. Barker ◽  
Patrick J. Bolton ◽  
...  
Keyword(s):  
Neutron Scattering ◽  
Small Angle ◽  
Small Angle Neutron Scattering ◽  
Deep Submicron

Microstructure of die-cast alloys Mg–Zn–Al(–Ca): a study by electron microscopy and small-angle neutron scattering

2003 ◽  
Vol 94 (5) ◽  
pp. 564-571 ◽  
Author(s):  
Michael Vogel ◽  
Oliver Kraft ◽  
Peter Staron ◽  
Helmut Clemens ◽  
Rainer Rauh ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Neutron Scattering ◽  
Small Angle ◽  
Small Angle Neutron Scattering ◽  
Die Cast ◽  
Cast Alloys
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