Metrology, Inspection, and Process Control for Microlithography XXXIII
Latest Publications

TOTAL DOCUMENTS

100
(FIVE YEARS 0)

H-INDEX

1
(FIVE YEARS 0)

Published By SPIE

9781510625655, 9781510625662
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Machine learning and hybrid metrology using scatterometry and LE-XRF to detect voids in copper lines

2019 ◽  
Author(s):  
Dexin Kong ◽  
Koichi Motoyama ◽  
Abraham Arceo de la peña ◽  
Huai Huang ◽  
Brock Mendoza ◽  
...  
Keyword(s):  
Machine Learning

Improved sub-surface AFM using photothermal actuation

2019 ◽  
Author(s):  
Maarten E. van Reijzen ◽  
Mehmet S. Tamer ◽  
Maarten H. van Es ◽  
Martijn M. C. J. M. van Riel ◽  
Sasan Keyvani ◽  
...  

scholarly journals Machine learning for predictive electrical performance using OCD (Erratum)

2019 ◽  
Author(s):  
Sayantan Das ◽  
Joey Hung ◽  
Sandip Halder ◽  
Guillaume Schelcher ◽  
Roy Koret ◽  
...  
Keyword(s):  
Machine Learning ◽  
Electrical Performance

Full structure transistor process monitoring of boron and germanium in PFET EPI using in-line XPS

2019 ◽  
Author(s):  
Jusang Lee ◽  
Ganesh Subramanian ◽  
Manasa Medikonda ◽  
Hossam Lazkani ◽  
Judson Holt ◽  
...  
Keyword(s):  
Process Monitoring ◽  
Full Structure

SEM inspection and review method for addressing EUV stochastic defects

2019 ◽  
Author(s):  
Tal Itzkovich ◽  
Aner Avakrat ◽  
Shimon Levi ◽  
Omri Baum ◽  
Noam Amit ◽  
...  

3D optical proximity model optimization using inline 3DSEM metrology

2019 ◽  
Author(s):  
Shimon Levi ◽  
Ishai Schwarzban ◽  
Angela Karvtsov ◽  
Matan Tobayas ◽  
Hans-Jurgen Stock ◽  
...  
Keyword(s):  
Model Optimization

Application of aberration corrected low voltage SEM for metrology

2019 ◽  
Author(s):  
Zhaohui Cheng ◽  
Hideto Dohi ◽  
Shingo Hayashi ◽  
Kotoko Hirose ◽  
Hideyuki Kazumi
Keyword(s):  
Low Voltage ◽  
Aberration Corrected
Load More ...
Sign in / Sign up

Export Citation Format

Share Document