Multilayer oxidation of AlAs by thermal and electron beam induced decomposition of H[sub 2]O in ultrahigh vacuum

1998 ◽  
Vol 16 (4) ◽  
pp. 2199 ◽  
Author(s):  
S. I. Yi
Keyword(s):  
Electron Beam ◽  
Ultrahigh Vacuum ◽  
Induced Decomposition

Electron Beam Induced Decomposition of Palladium Acetate

1991 ◽  
Vol 236 ◽  
Author(s):  
T.J. Stark ◽  
T.M. Mayer ◽  
P.E. Russell
Keyword(s):  
Electron Beam ◽  
Thick Films ◽  
Gas Analysis ◽  
Palladium Acetate ◽  
Metallic State ◽  
Xps Analysis ◽  
Volatile Products ◽  
Residual Gas ◽  
Induced Decomposition

AbstractA focused electron beam has been used to selectively decompose sub micron thick films of palladium acetate, Pd(OOCCH3)2, resulting in the formation of <0.1μm wide Pd rich features. Resistivity of the palladium acetate film decreased when exposed to doses above 500μC/cm2. Annealing to 160°C further reduces the resistivity of the exposed areas to as low as 100μΔcm. XPS analysis of the exposed areas indicate that the Pd is reduced to a metallic state and that the ratio of C and 0 to Pd drops to 1.5 and 0.6, respectively, after exposure. Residual gas analysis during exposure indicates that CO2 and CH3 are the primary volatile products of the decomposition.

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