A preliminary diffraction study of electron-beam induced decomposition in ?-AlH3

1982 ◽  
Vol 1 (4) ◽  
pp. 163-166 ◽  
Author(s):  
P. J. Herley ◽  
W. Jones
Keyword(s):  
Electron Beam ◽  
Diffraction Study ◽  
Induced Decomposition

Electron Beam Induced Decomposition of Palladium Acetate

1991 ◽  
Vol 236 ◽  
Author(s):  
T.J. Stark ◽  
T.M. Mayer ◽  
P.E. Russell
Keyword(s):  
Electron Beam ◽  
Thick Films ◽  
Gas Analysis ◽  
Palladium Acetate ◽  
Metallic State ◽  
Xps Analysis ◽  
Volatile Products ◽  
Residual Gas ◽  
Induced Decomposition

AbstractA focused electron beam has been used to selectively decompose sub micron thick films of palladium acetate, Pd(OOCCH3)2, resulting in the formation of <0.1μm wide Pd rich features. Resistivity of the palladium acetate film decreased when exposed to doses above 500μC/cm2. Annealing to 160°C further reduces the resistivity of the exposed areas to as low as 100μΔcm. XPS analysis of the exposed areas indicate that the Pd is reduced to a metallic state and that the ratio of C and 0 to Pd drops to 1.5 and 0.6, respectively, after exposure. Residual gas analysis during exposure indicates that CO2 and CH3 are the primary volatile products of the decomposition.

Electron beam-induced decomposition of MBE grown CaF2 films: an AES study

Vacuum ◽  
1990 ◽  
Vol 41 (4-6) ◽  
pp. 1003-1005 ◽  
Author(s):  
S Baunack ◽  
A Zehe
Keyword(s):  
Electron Beam ◽  
Induced Decomposition

Acetone and the precursor ligand acetylacetone: distinctly different electron beam induced decomposition?

2015 ◽  
Vol 17 (2) ◽  
pp. 1204-1216 ◽  
Author(s):  
Jonas Warneke ◽  
Willem F. Van Dorp ◽  
Petra Rudolf ◽  
Michal Stano ◽  
Peter Papp ◽  
...  
Keyword(s):  
Electron Beam ◽  
Organic Material ◽  
Electron Beam Induced Deposition ◽  
Induced Decomposition

The electron-induced reactions of acetylacetone and acetone reveal why organic material is retained in electron beam induced deposition from acetylacetonate precursors.

Electron-Beam-Induced Decomposition and Growth

2012 ◽  
pp. 749-749
Author(s):  
Mélanie Auffan ◽  
Catherine Santaella ◽  
Alain Thiéry ◽  
Christine Paillès ◽  
Jérôme Rose ◽  
...  
Keyword(s):  
Electron Beam ◽  
Induced Decomposition
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