Gas phase low energy electron induced decomposition of the focused electron beam induced deposition (FEBID) precursor trimethyl (methylcyclopentadienyl) platinum(iv) (MeCpPtMe3)

2012 ◽  
Vol 14 (42) ◽  
pp. 14611 ◽  
Author(s):  
Sarah Engmann ◽  
Michal Stano ◽  
Štefan Matejčík ◽  
Oddur Ingólfsson
2018 ◽  
Vol 20 (8) ◽  
pp. 5644-5656 ◽  
Author(s):  
Rachel M. Thorman ◽  
Ilyas Unlu ◽  
Kelsea Johnson ◽  
Ragnar Bjornsson ◽  
Lisa McElwee-White ◽  
...  

Low energy electron-induced decomposition of a potential bimetallic nanofabrication precursor is studied in gas-phase, at surfaces and by quantum chemical calculations.


2017 ◽  
Vol 19 (20) ◽  
pp. 13264-13271 ◽  
Author(s):  
Rachel M. Thorman ◽  
Joseph A. Brannaka ◽  
Lisa McElwee-White ◽  
Oddur Ingólfsson

Low energy electron induced fragmentation of (η3-C3H5)Ru(CO)3Br is reported in relation to the suitability of different ligands in the design of focused electron beam induced deposition precursors.


2018 ◽  
Vol 9 ◽  
pp. 555-579 ◽  
Author(s):  
Ragesh Kumar T P ◽  
Paul Weirich ◽  
Lukas Hrachowina ◽  
Marc Hanefeld ◽  
Ragnar Bjornsson ◽  
...  

In the current contribution we present a comprehensive study on the heteronuclear carbonyl complex H2FeRu3(CO)13 covering its low energy electron induced fragmentation in the gas phase through dissociative electron attachment (DEA) and dissociative ionization (DI), its decomposition when adsorbed on a surface under controlled ultrahigh vacuum (UHV) conditions and exposed to irradiation with 500 eV electrons, and its performance in focused electron beam induced deposition (FEBID) at room temperature under HV conditions. The performance of this precursor in FEBID is poor, resulting in maximum metal content of 26 atom % under optimized conditions. Furthermore, the Ru/Fe ratio in the FEBID deposit (≈3.5) is higher than the 3:1 ratio predicted. This is somewhat surprising as in recent FEBID studies on a structurally similar bimetallic precursor, HFeCo3(CO)12, metal contents of about 80 atom % is achievable on a routine basis and the deposits are found to maintain the initial Co/Fe ratio. Low temperature (≈213 K) surface science studies on thin films of H2FeRu3(CO)13 demonstrate that electron stimulated decomposition leads to significant CO desorption (average of 8–9 CO groups per molecule) to form partially decarbonylated intermediates. However, once formed these intermediates are largely unaffected by either further electron irradiation or annealing to room temperature, with a predicted metal content similar to what is observed in FEBID. Furthermore, gas phase experiments indicate formation of Fe(CO)4 from H2FeRu3(CO)13 upon low energy electron interaction. This fragment could desorb at room temperature under high vacuum conditions, which may explain the slight increase in the Ru/Fe ratio of deposits in FEBID. With the combination of gas phase experiments, surface science studies and actual FEBID experiments, we can offer new insights into the low energy electron induced decomposition of this precursor and how this is reflected in the relatively poor performance of H2FeRu3(CO)13 as compared to the structurally similar HFeCo3(CO)12.


2018 ◽  
Vol 9 ◽  
pp. 57-65 ◽  
Author(s):  
Leo Sala ◽  
Iwona B Szymańska ◽  
Céline Dablemont ◽  
Anne Lafosse ◽  
Lionel Amiaud

Background: Focused electron beam induced deposition (FEBID) allows for the deposition of free standing material within nanometre sizes. The improvement of the technique needs a combination of new precursors and optimized irradiation strategies to achieve a controlled fragmentation of the precursor for leaving deposited material of desired composition. Here a new class of copper precursors is studied following an approach that probes some surface processes involved in the fragmentation of precursors. We use complexes of copper(II) with amines and perfluorinated carboxylate ligands that are solid and stable under ambient conditions. They are directly deposited on the surface for studying the fragmentation with surface science tools. Results: Infrared spectroscopy and high-resolution electron energy loss spectroscopy (HREELS) are combined to show that the precursor is able to spontaneously lose amine ligands under vacuum. This loss can be enhanced by mild heating. The combination of mass spectrometry and low-energy electron irradiation (0–15 eV) shows that full amine ligands can be released upon irradiation, and that fragmentation of the perfluorinated ligands is induced by electrons of energy as low as 1.5 eV. Finally, the cross section for this process is estimated from the temporal evolution in the experiments on electron-stimulated desorption (ESD). Conclusion: The release of full ligands under high vacuum and by electron irradiation, and the cross section measured here for ligands fragmentation allow one to envisage the use of the two precursors for FEBID studies.


2021 ◽  
Vol 640 (3) ◽  
pp. 032006
Author(s):  
U A Bliznyuk ◽  
P Yu Borchegovskaya ◽  
A P Chernyaev ◽  
V S Ipatova ◽  
V A Leontiev ◽  
...  

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