Advanced electron beam source for ultrahigh vacuum (molecular beam epitaxy) and high vacuum applications of thin film deposition

1994 ◽  
Vol 12 (4) ◽  
pp. 1628-1630 ◽  
Author(s):  
J. W. Moore ◽  
N. K. Tsujimoto
Keyword(s):  
Thin Film ◽  
Electron Beam ◽  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
High Vacuum ◽  
Ultrahigh Vacuum ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Beam Source

Molecular Beam Epitaxy: Thin Film Growth and Surface Studies

MRS Bulletin ◽  
1988 ◽  
Vol 13 (11) ◽  
pp. 29-36 ◽  
Author(s):  
Theodore D. Moustakas
Keyword(s):  
Thin Film ◽  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Film Growth ◽  
Ultrahigh Vacuum ◽  
Physical Method ◽  
Thin Film Deposition ◽  
Deposition Process ◽  
Film Deposition ◽  
Gaas Films

Molecular Beam Epitaxy (MBE) is a thin film deposition process in which thermal beams of atoms or molecules react on the clean surface of a single-crystalline substrate, held at high temperatures under ultrahigh vacuum conditions, to form an epitaxial film. Thus, contrary to the CVD processes described in the other articles, the MBE process is a physical method of thin film deposition.The vacuum requirements for the MBE process are typically better than 10−10torr. This makes it possible to grow epitaxial films with high purity and excellent crystal quality at relatively low substrate temperatures. Additionally, the ultrahigh vacuum environment allows the study of surface, interface, and bulk properties of the growing film in real time, by employing a variety of structural and analytical probes.Although the MBE deposition process was first proposed by Günther in 1958, its implementation had to wait for the development of the ultrahigh vacuum technology. In 1968 Davey and Pankey successfully grew epitaxial GaAs films by the MBE process. At the same time Arthur's work on the kinetics of GaAs growth laid the groundwork for the growth of high quality MBE films of GaAs and other III-V compounds by Arthur and LePore and Cho.

scholarly journals Polymer assisted deposition of epitaxial oxide thin films

2018 ◽  
Vol 6 (15) ◽  
pp. 3834-3844 ◽  
Author(s):  
José Manuel Vila-Fungueiriño ◽  
Beatriz Rivas-Murias ◽  
Juan Rubio-Zuazo ◽  
Adrian Carretero-Genevrier ◽  
Massimo Lazzari ◽  
...  
Keyword(s):  
Thin Film ◽  
Molecular Beam ◽  
High Vacuum ◽  
Pulsed Laser ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Laser Deposition ◽  
Chemical Solution ◽  
Solution Methods ◽  
Epitaxial Oxide

Chemical solution methods for thin-film deposition constitute an affordable alternative to high-vacuum physical technologies, like Sputtering, Pulsed Laser Deposition (PLD) or Molecular Beam Epitaxy (MBE).

Modular Electron Beam Source for Thin Film Deposition

1966 ◽  
Vol 37 (10) ◽  
pp. 1421-1422 ◽  
Author(s):  
K. L. Chopra ◽  
M. R. Randlett
Keyword(s):  
Thin Film ◽  
Electron Beam ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Beam Source

A study of the CuO phase formation during thin film deposition by molecular beam epitaxy

1998 ◽  
Vol 324 (1-2) ◽  
pp. 37-43 ◽  
Author(s):  
K.P Muthe ◽  
J.C Vyas ◽  
Savita N Narang ◽  
D.K Aswal ◽  
S.K Gupta ◽  
...  
Keyword(s):  
Thin Film ◽  
Molecular Beam Epitaxy ◽  
Phase Formation ◽  
Molecular Beam ◽  
Thin Film Deposition ◽  
Film Deposition

Thin film deposition of BaO by molecular beam epitaxy

1992 ◽  
Vol 118 (1-2) ◽  
pp. 213-217 ◽  
Author(s):  
K.P. Muthe ◽  
J.C. Vyas ◽  
G.P. Kothiyal ◽  
D.P. Gandhi ◽  
A.K. Debnath ◽  
...  
Keyword(s):  
Thin Film ◽  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Thin Film Deposition ◽  
Film Deposition

Optimization of a plasma focus device as an electron beam source for thin film deposition

2007 ◽  
Vol 16 (2) ◽  
pp. 250-256 ◽  
Author(s):  
T Zhang ◽  
J Lin ◽  
A Patran ◽  
D Wong ◽  
S M Hassan ◽  
...  
Keyword(s):  
Thin Film ◽  
Electron Beam ◽  
Plasma Focus ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Plasma Focus Device ◽  
Beam Source

ELECTRON BEAM SOURCE MOLECULAR BEAM EPITAXY OF AlxGa1-xAs GRADED BAND GAP DEVICE STRUCTURES

1988 ◽  
Vol 49 (C4) ◽  
pp. C4-607-C4-614
Author(s):  
R. J. MALIK ◽  
A. F.J. LEVI ◽  
B. F. LEVINE ◽  
R. C. MILLER ◽  
D. V. LANG ◽  
...  
Keyword(s):  
Electron Beam ◽  
Molecular Beam Epitaxy ◽  
Band Gap ◽  
Molecular Beam ◽  
Beam Source ◽  
Device Structures ◽  
Graded Band Gap
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