Pattern profile control of polysilicon in magnetron reactive ion etching

1997 ◽  
Vol 15 (2) ◽  
pp. 221
Author(s):  
Masakatsu Kimizuka
Keyword(s):  
Reactive Ion Etching ◽  
Ion Etching ◽  
Profile Control

NbN edge junction fabrication: edge profile control by reactive ion etching

1989 ◽  
Vol 25 (2) ◽  
pp. 1239-1242 ◽  
Author(s):  
X.F. Meng ◽  
R.S. Amos ◽  
A.W. Lichtenberger ◽  
R.J. Mattauch ◽  
M.J. Feldman
Keyword(s):  
Reactive Ion Etching ◽  
Ion Etching ◽  
Profile Control ◽  
Edge Profile

Nanopattern Profile Control Technology Using Reactive Ion Etching for 100 GB Optical Disc Mastering

2006 ◽  
Vol 45 (2B) ◽  
pp. 1414-1418 ◽  
Author(s):  
Megumi Fujimura ◽  
Yasuo Hosoda ◽  
Masahiro Katsumura ◽  
Masaki Kobayashi ◽  
Hiroaki Kitahara ◽  
...  
Keyword(s):  
Reactive Ion Etching ◽  
Control Technology ◽  
Optical Disc ◽  
Ion Etching ◽  
Profile Control

Multilayer Resist Profile Control in Oxygen Reactive Ion Etching Using Ethanol Gas Mixture

1994 ◽  
Vol 33 (Part 1, No. 7B) ◽  
pp. 4450-4453 ◽  
Author(s):  
Yasuki Kimura ◽  
Ryouichi Aoyama ◽  
Seki Suzuki
Keyword(s):  
Reactive Ion Etching ◽  
Gas Mixture ◽  
Ion Etching ◽  
Profile Control ◽  
Multilayer Resist

scholarly journals Towards the Fabrication of High-Aspect-Ratio Silicon Gratings by Deep Reactive Ion Etching

Micromachines ◽  
2020 ◽  
Vol 11 (9) ◽  
pp. 864 ◽  
Author(s):  
Zhitian Shi ◽  
Konstantins Jefimovs ◽  
Lucia Romano ◽  
Marco Stampanoni
Keyword(s):  
Aspect Ratio ◽  
Etching Rate ◽  
Critical Role ◽  
Reactive Ion Etching ◽  
Chamber Pressure ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
X Ray ◽  
Aspect Ratios ◽  
Profile Control

The key optical components of X-ray grating interferometry are gratings, whose profile requirements play the most critical role in acquiring high quality images. The difficulty of etching grating lines with high aspect ratios when the pitch is in the range of a few micrometers has greatly limited imaging applications based on X-ray grating interferometry. A high etching rate with low aspect ratio dependence is crucial for higher X-ray energy applications and good profile control by deep reactive ion etching of grating patterns. To achieve this goal, a modified Coburn–Winters model was applied in order to study the influence of key etching parameters, such as chamber pressure and etching power. The recipe for deep reactive ion etching was carefully fine-tuned based on the experimental results. Silicon gratings with an area of 70 × 70 mm2, pitch size of 1.2 and 2 μm were fabricated using the optimized process with aspect ratio α of ~67 and 77, respectively.

Process Characterization of a Load-Locked, Reactive Ion Etching System

1984 ◽  
Vol 38 ◽  
Author(s):  
Margaret M. Hendriks ◽  
S. Shanfield
Keyword(s):  
Reactive Ion Etching ◽  
Single Crystal Silicon ◽  
Chamber Pressure ◽  
Crystal Silicon ◽  
Ion Etching ◽  
Process Characterization ◽  
Profile Control ◽  
Wall Profile ◽  
Etching System

AbstractWe report on process characterization of contact hole etching in a load-locked, hexa-gonal reactive ion etching system. Contact holes were etched in silicon dioxide and phos-phosilicate glass (PSG) with emphasis on wall profile control and selectivity to the underlayer of either single crystal silicon, polysilicon, or aluminum.To achieve these requirements, a two stage etch process was developed. In the first stage, controlled wall taper is obtained with a mixture of CHF3 and O2. The second stage utilizes a mixture of CHF3 and a small amount of CO2 to obtain high selectivity to the underlying material. Evaluation of the effects of chamber pressure, RF power, and gas mixture on taper angle, selectivity, resist erosion, and etch rates is presented.In addition, evidence which suggests that the reproducibility of optimum etch condi-tions can be enhanced by the use of a continuously pumped process chamber will be dis-cussed.

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