Spatial-phase-locked electron-beam lithography: Initial test results

1993 ◽  
Vol 11 (6) ◽  
pp. 2342 ◽  
Author(s):  
Juan Ferrera
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Test Results ◽  
Initial Test ◽  
Spatial Phase

Extending Spatial-Phase-Locked Electron-Beam Lithography to Two Dimensions

1997 ◽  
Vol 36 (Part 1, No. 12B) ◽  
pp. 7557-7559 ◽  
Author(s):  
James G. Goodberlet ◽  
Juan Ferrera ◽  
Maya Farhoud ◽  
Vanessa Z. Chan ◽  
Henry I. Smith
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Two Dimensions ◽  
Spatial Phase

scholarly journals Two-dimensional spatial-phase-locked electron-beam lithography via sparse sampling

2000 ◽  
Vol 18 (6) ◽  
pp. 3268 ◽  
Author(s):  
J. T. Hastings ◽  
Feng Zhang ◽  
M. A. Finlayson ◽  
J. G. Goodberlet ◽  
Henry I. Smith
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Sparse Sampling ◽  
Two Dimensional ◽  
Spatial Phase
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