Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography

2002 ◽  
Vol 20 (6) ◽  
pp. 2753 ◽  
Author(s):  
J. T. Hastings ◽  
Michael H. Lim ◽  
J. G. Goodberlet ◽  
Henry I. Smith
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Optical Waveguides ◽  
Spatial Phase

Electron beam lithography on LiF films for integrated active optical waveguides

1998 ◽  
Author(s):  
Giuseppe Baldacchini ◽  
E. Burattini ◽  
Antonio Grilli ◽  
A. Raco ◽  
Antonella Mancini ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Optical Waveguides

Extending Spatial-Phase-Locked Electron-Beam Lithography to Two Dimensions

1997 ◽  
Vol 36 (Part 1, No. 12B) ◽  
pp. 7557-7559 ◽  
Author(s):  
James G. Goodberlet ◽  
Juan Ferrera ◽  
Maya Farhoud ◽  
Vanessa Z. Chan ◽  
Henry I. Smith
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Two Dimensions ◽  
Spatial Phase

Polyimide optical waveguides fabricated with electron beam lithography

1990 ◽  
Vol 29 (27) ◽  
pp. 3880 ◽  
Author(s):  
M. J. Rooks ◽  
H. V. Roussell ◽  
L. M. Johnson
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Optical Waveguides
Sign in / Sign up

Export Citation Format

Share Document