Field-programmable gate array implementation of real-time spatial-phase locking for electron-beam lithography
2008 ◽
Vol 26
(6)
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pp. 2316-2321
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Keyword(s):
2007 ◽
Vol 25
(6)
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pp. 2072
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2013 ◽
Vol 7
(6)
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pp. 337-344
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Keyword(s):
Keyword(s):
2008 ◽
Vol 79
(11)
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pp. 114301
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2016 ◽
Vol 140
(4)
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pp. 3256-3256
Keyword(s):
2019 ◽
Vol 19
(13)
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pp. 5086-5097
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2016 ◽
Vol 63
(12)
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pp. 1001-1016
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