Real-time spatial-phase locking for vector-scan electron beam lithography

2007 ◽  
Vol 25 (6) ◽  
pp. 2072 ◽  
Author(s):  
Yugu Yang ◽  
J. T. Hastings
Keyword(s):  
Electron Beam ◽  
Real Time ◽  
Electron Beam Lithography ◽  
Phase Locking ◽  
Spatial Phase

Real-time dose control for electron-beam lithography

2020 ◽  
Vol 32 (9) ◽  
pp. 095302
Author(s):  
Yugu Yang-Keathley ◽  
Stephen A Maloney ◽  
J Todd Hastings
Keyword(s):  
Electron Beam ◽  
Real Time ◽  
Electron Beam Lithography ◽  
Dose Control ◽  
Time Dose

Extending Spatial-Phase-Locked Electron-Beam Lithography to Two Dimensions

1997 ◽  
Vol 36 (Part 1, No. 12B) ◽  
pp. 7557-7559 ◽  
Author(s):  
James G. Goodberlet ◽  
Juan Ferrera ◽  
Maya Farhoud ◽  
Vanessa Z. Chan ◽  
Henry I. Smith
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Two Dimensions ◽  
Spatial Phase
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