Test structures for secondary ion mass spectrometry analysis of patterned silicon wafers

1992 ◽  
Vol 10 (4) ◽  
pp. 2880-2886 ◽  
Author(s):  
F. A. Stevie ◽  
G. W. Cochran ◽  
P. M. Kahora ◽  
W. A. Russell ◽  
N. Linde ◽  
...  
2015 ◽  
Vol 87 (15) ◽  
pp. 7795-7802 ◽  
Author(s):  
Rainer Kassenböhmer ◽  
Felix Draude ◽  
Martin Körsgen ◽  
Andreas Pelster ◽  
Heinrich F. Arlinghaus

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