Simulations of real‐time control of two‐dimensional features in inductively coupled plasma sources for etching applications

1995 ◽  
Vol 13 (5) ◽  
pp. 2456-2463 ◽  
Author(s):  
P. L. G. Ventzek ◽  
N. Yamada ◽  
Y. Sakai ◽  
H. Tagashira ◽  
K. Kitamori
Keyword(s):  
Real Time ◽  
Inductively Coupled Plasma ◽  
Two Dimensional ◽  
Real Time Control ◽  
Plasma Sources ◽  
Inductively Coupled ◽  
Time Control

Real-time control of ion density and ion energy in chlorine inductively coupled plasma etch processing

2003 ◽  
Vol 21 (4) ◽  
pp. 1183-1187 ◽  
Author(s):  
Cheng-Hung Chang ◽  
Keh-Chyang Leou ◽  
Chaung Lin ◽  
Tsan-Lang Lin ◽  
Chih-Wei Tseng ◽  
...  
Keyword(s):  
Real Time ◽  
Inductively Coupled Plasma ◽  
Real Time Control ◽  
Plasma Etch ◽  
Ion Density ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Time Control

Two‐dimensional hybrid model of inductively coupled plasma sources for etching

1993 ◽  
Vol 63 (5) ◽  
pp. 605-607 ◽  
Author(s):  
Peter L. G. Ventzek ◽  
Timothy J. Sommerer ◽  
Robert J. Hoekstra ◽  
Mark J. Kushner
Keyword(s):  
Hybrid Model ◽  
Inductively Coupled Plasma ◽  
Two Dimensional ◽  
Plasma Sources ◽  
Inductively Coupled

A Real Time Control Architecture for Continuously Managing Patients in a Care Unit

1995 ◽  
Vol 34 (05) ◽  
pp. 475-488
Author(s):  
B. Seroussi ◽  
J. F. Boisvieux ◽  
V. Morice
Keyword(s):  
Real Time ◽  
Linear Time ◽  
Treatment Plan ◽  
Control Architecture ◽  
Real Time Control ◽  
Time Representation ◽  
Time Control ◽  
Continuous Support ◽  
Definition Of ◽  
Computerized System

Abstract:The monitoring and treatment of patients in a care unit is a complex task in which even the most experienced clinicians can make errors. A hemato-oncology department in which patients undergo chemotherapy asked for a computerized system able to provide intelligent and continuous support in this task. One issue in building such a system is the definition of a control architecture able to manage, in real time, a treatment plan containing prescriptions and protocols in which temporal constraints are expressed in various ways, that is, which supervises the treatment, including controlling the timely execution of prescriptions and suggesting modifications to the plan according to the patient’s evolving condition. The system to solve these issues, called SEPIA, has to manage the dynamic, processes involved in patient care. Its role is to generate, in real time, commands for the patient’s care (execution of tests, administration of drugs) from a plan, and to monitor the patient’s state so that it may propose actions updating the plan. The necessity of an explicit time representation is shown. We propose using a linear time structure towards the past, with precise and absolute dates, open towards the future, and with imprecise and relative dates. Temporal relative scales are introduced to facilitate knowledge representation and access.

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