Application of rf sensors for real-time control of inductively coupled plasma etching equipment

1997 ◽  
Author(s):  
Roger Patrick ◽  
Norman Williams ◽  
Chii G. Lee
Keyword(s):  
Real Time ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Real Time Control ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled ◽  
Time Control

Real-time control of ion density and ion energy in chlorine inductively coupled plasma etch processing

2003 ◽  
Vol 21 (4) ◽  
pp. 1183-1187 ◽  
Author(s):  
Cheng-Hung Chang ◽  
Keh-Chyang Leou ◽  
Chaung Lin ◽  
Tsan-Lang Lin ◽  
Chih-Wei Tseng ◽  
...  
Keyword(s):  
Real Time ◽  
Inductively Coupled Plasma ◽  
Real Time Control ◽  
Plasma Etch ◽  
Ion Density ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Time Control

Inductively coupled plasma etching for delineation of InAs/GaSb pixels

2012 ◽  
Author(s):  
Jean Nguyen ◽  
John Gill ◽  
Sir B. Rafol ◽  
Alexander Soibel ◽  
Arezou Khoshakhlagh ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Inductively coupled plasma etching of HgCdTe using a CH4-based mixture

2005 ◽  
Vol 34 (6) ◽  
pp. 740-745 ◽  
Author(s):  
E. Laffosse ◽  
J. Baylet ◽  
J. P. Chamonal ◽  
G. Destefanis ◽  
G. Cartry ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Fabrication of GaN nanorods by inductively coupled plasma etching via SiO2 nanosphere lithography

2009 ◽  
Vol 517 (14) ◽  
pp. 3859-3861 ◽  
Author(s):  
Byung-Jae Kim ◽  
Hyunjung Jung ◽  
Hong-Yeol Kim ◽  
Joona Bang ◽  
Jihyun Kim
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Nanosphere Lithography ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Factors Affecting the Top Stripping of GaAs Microwire Array Fabricated by Inductively Coupled Plasma Etching

2015 ◽  
Vol 32 (5) ◽  
pp. 058102 ◽  
Author(s):  
Ying Cheng ◽  
Ji-Jun Zou ◽  
Ming Wan ◽  
Wei-Lu Wang ◽  
Xin-Cun Peng ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Factors Affecting ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled
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