Two‐dimensional hybrid model of inductively coupled plasma sources for etching

Peter L. G. Ventzek; Timothy J. Sommerer; Robert J. Hoekstra; Mark J. Kushner

doi:10.1063/1.109963

Two‐dimensional hybrid model of inductively coupled plasma sources for etching

Applied Physics Letters ◽

10.1063/1.109963 ◽

1993 ◽

Vol 63 (5) ◽

pp. 605-607 ◽

Cited By ~ 118

Author(s):

Peter L. G. Ventzek ◽

Timothy J. Sommerer ◽

Robert J. Hoekstra ◽

Mark J. Kushner

Keyword(s):

Hybrid Model ◽

Inductively Coupled Plasma ◽

Two Dimensional ◽

Plasma Sources ◽

Inductively Coupled

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Two-dimensional fluid model of high density inductively coupled plasma sources

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.587102 ◽

1994 ◽

Vol 12 (1) ◽

pp. 478 ◽

Cited By ~ 116

Author(s):

R. A. Stewart

Keyword(s):

Inductively Coupled Plasma ◽

Fluid Model ◽

High Density ◽

Two Dimensional ◽

Plasma Sources ◽

Inductively Coupled

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Two-dimensional modeling of nonlocal electron heating in inductively coupled plasma sources

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th IEEE International Conference (Cat. No.99CH36297) ◽

10.1109/plasma.1999.829307 ◽

2003 ◽

Author(s):

Y. Hu ◽

T.L. Lin ◽

C.W. Chang

Keyword(s):

Inductively Coupled Plasma ◽

Two Dimensional ◽

Electron Heating ◽

Plasma Sources ◽

Inductively Coupled ◽

Dimensional Modeling

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Simulations of real‐time control of two‐dimensional features in inductively coupled plasma sources for etching applications

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579488 ◽

1995 ◽

Vol 13 (5) ◽

pp. 2456-2463 ◽

Cited By ~ 5

Author(s):

P. L. G. Ventzek ◽

N. Yamada ◽

Y. Sakai ◽

H. Tagashira ◽

K. Kitamori

Keyword(s):

Real Time ◽

Inductively Coupled Plasma ◽

Two Dimensional ◽

Real Time Control ◽

Plasma Sources ◽

Inductively Coupled ◽

Time Control

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Two-dimensional nonlocal heating theory of planar-type inductively coupled plasma discharge

Physical Review E ◽

10.1103/physreve.55.7536 ◽

1997 ◽

Vol 55 (6) ◽

pp. 7536-7549 ◽

Cited By ~ 45

Author(s):

N. S. Yoon ◽

S. M. Hwang ◽

Duk-In Choi

Keyword(s):

Inductively Coupled Plasma ◽

Plasma Discharge ◽

Two Dimensional ◽

Inductively Coupled ◽

Nonlocal Heating

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2-D analytic model for inductively coupled plasma sources. I. Electromagnetic model and kinetic analysis

IEEE Transactions on Plasma Science ◽

10.1109/27.376562 ◽

1995 ◽

Vol 23 (1) ◽

pp. 65-73 ◽

Cited By ~ 6

Author(s):

Fa Dai ◽

C.-H.J. Wu

Keyword(s):

Kinetic Analysis ◽

Inductively Coupled Plasma ◽

Analytic Model ◽

Plasma Sources ◽

Inductively Coupled ◽

Electromagnetic Model

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Evaluation of analytical instrumentation. Part V. Inductively coupled plasma sources for use in emission spectrometry

Analytical Proceedings ◽

10.1039/ap9872400266 ◽

1987 ◽

Vol 24 (9) ◽

pp. 266 ◽

Cited By ~ 1

Keyword(s):

Inductively Coupled Plasma ◽

Emission Spectrometry ◽

Plasma Sources ◽

Inductively Coupled ◽

Analytical Instrumentation

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Two-dimensional (weak anion exchange chromatography-gel electrophoresis) separations coupling to inductively coupled plasma mass spectrometry strategy for analysis of metalloproteins

Talanta ◽

10.1016/j.talanta.2018.03.037 ◽

2018 ◽

Vol 184 ◽

pp. 404-410 ◽

Cited By ~ 10

Author(s):

Xueting Yan ◽

Bin He ◽

Dingyi Wang ◽

Ligang Hu ◽

Lihong Liu ◽

...

Keyword(s):

Mass Spectrometry ◽

Anion Exchange ◽

Gel Electrophoresis ◽

Inductively Coupled Plasma ◽

Anion Exchange Chromatography ◽

Exchange Chromatography ◽

Two Dimensional ◽

Inductively Coupled ◽

Plasma Mass Spectrometry ◽

Weak Anion Exchange Chromatography

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Effect of electron kinetics on global simulations for inductively coupled plasma sources

2016 IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2016.7534135 ◽

2016 ◽

Author(s):

Deuk-Chul Kwon ◽

Mi-Young Song ◽

Jung-Sik Yoon

Keyword(s):

Inductively Coupled Plasma ◽

Plasma Sources ◽

Electron Kinetics ◽

Inductively Coupled

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Evolution of Two-Dimensional Plasma Density on the E–H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma

IEEE Transactions on Plasma Science ◽

10.1109/tps.2011.2135382 ◽

2011 ◽

Vol 39 (11) ◽

pp. 2536-2537 ◽

Cited By ~ 8

Author(s):

Hyo-Chang Lee ◽

Young-Cheol Kim ◽

Chin-Wook Chung

Keyword(s):

Plasma Density ◽

Inductively Coupled Plasma ◽

Mode Transition ◽

Two Dimensional ◽

Inductively Coupled ◽

Heating Mode

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Identification of selenium species in selenium-enriched Lens esculenta plants by using two-dimensional liquid chromatography-inductively coupled plasma mass spectrometry and [77Se]selenomethionine selenium oxide spikes

Journal of Chromatography A ◽

10.1016/j.chroma.2006.11.031 ◽

2007 ◽

Vol 1139 (2) ◽

pp. 247-253 ◽

Cited By ~ 35

Author(s):

Zoyne Pedrero ◽

Jorge Ruiz Encinar ◽

Yolanda Madrid ◽

Carmen Cámara

Keyword(s):

Mass Spectrometry ◽

Liquid Chromatography ◽

Inductively Coupled Plasma ◽

Two Dimensional ◽

Lens Esculenta ◽

Selenium Species ◽

Inductively Coupled ◽

Plasma Mass Spectrometry ◽

Selenium Oxide

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