Two-dimensional fluid model of high density inductively coupled plasma sources

1994 ◽  
Vol 12 (1) ◽  
pp. 478 ◽  
Author(s):  
R. A. Stewart
Keyword(s):  
Inductively Coupled Plasma ◽  
Fluid Model ◽  
High Density ◽  
Two Dimensional ◽  
Plasma Sources ◽  
Inductively Coupled

scholarly journals Low-frequency, high-density, inductively coupled plasma sources: Operation and applications

2001 ◽  
Vol 8 (5) ◽  
pp. 2549-2557 ◽  
Author(s):  
S. Xu ◽  
K. N. Ostrikov ◽  
Y. Li ◽  
E. L. Tsakadze ◽  
I. R. Jones
Keyword(s):  
Inductively Coupled Plasma ◽  
Low Frequency ◽  
High Density ◽  
Plasma Sources ◽  
Inductively Coupled

Two‐dimensional hybrid model of inductively coupled plasma sources for etching

1993 ◽  
Vol 63 (5) ◽  
pp. 605-607 ◽  
Author(s):  
Peter L. G. Ventzek ◽  
Timothy J. Sommerer ◽  
Robert J. Hoekstra ◽  
Mark J. Kushner
Keyword(s):  
Hybrid Model ◽  
Inductively Coupled Plasma ◽  
Two Dimensional ◽  
Plasma Sources ◽  
Inductively Coupled
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