Secondary ion mass spectrometry analysis of a three‐level metal structure using sample rotation

1994 ◽  
Vol 12 (4) ◽  
pp. 2363-2367 ◽  
Author(s):  
F. A. Stevie ◽  
J. L. Moore ◽  
S. M. Merchant ◽  
C. A. Bollinger ◽  
E. A. Dein
2015 ◽  
Vol 87 (15) ◽  
pp. 7795-7802 ◽  
Author(s):  
Rainer Kassenböhmer ◽  
Felix Draude ◽  
Martin Körsgen ◽  
Andreas Pelster ◽  
Heinrich F. Arlinghaus

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