Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas

Ju-Ho Kim; Deuk-Chul Kwon; Chin-Wook Chung

doi:10.1116/1.5133978

Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.5133978 ◽

2020 ◽

Vol 38 (2) ◽

pp. 022801

Author(s):

Ju-Ho Kim ◽

Deuk-Chul Kwon ◽

Chin-Wook Chung

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Frequency ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Low Frequency Power ◽

Coupled Plasmas ◽

Frequency Power

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Modeling argon inductively coupled plasmas: The electron energy distribution function and metastable kinetics

Journal of Applied Physics ◽

10.1063/1.1452772 ◽

2002 ◽

Vol 91 (6) ◽

pp. 3539-3546 ◽

Cited By ~ 55

Author(s):

Mark W. Kiehlbauch ◽

David B. Graves

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Tuning Effect on the Electron Energy Distribution Function of an Inert Gas Mixture in nitrogen Inductively Coupled Plasma Discharges

Chinese Physics Letters ◽

10.1088/0256-307x/20/9/334 ◽

2003 ◽

Vol 20 (9) ◽

pp. 1527-1529 ◽

Cited By ~ 3

Author(s):

Ma Jie ◽

Pu Yi-Kang

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Inductively Coupled Plasma ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Inert Gas ◽

Gas Mixture ◽

Plasma Discharges ◽

Inductively Coupled

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Measurements of the electron energy distribution function in molecular gases in a shielded inductively coupled plasma

Journal of Applied Physics ◽

10.1063/1.1290450 ◽

2000 ◽

Vol 88 (7) ◽

pp. 3889 ◽

Cited By ~ 52

Author(s):

Harmeet Singh ◽

David B. Graves

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Inductively Coupled Plasma ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Molecular Gases ◽

Inductively Coupled

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Lorentz force effect on electron energy distribution in low pressure inductively coupled plasmas

IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) ◽

10.1109/ppps.2001.961052 ◽

2002 ◽

Author(s):

V.I. Kolobov ◽

V.A. Godyak

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Lorentz Force ◽

Low Pressure ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Force Effect ◽

Inductively Coupled ◽

Coupled Plasmas

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Electron energy distribution function close to the mode transition region in an inductively coupled gaseous electronics conference reference cell

Applied Physics Letters ◽

10.1063/1.2362599 ◽

2006 ◽

Vol 89 (16) ◽

pp. 161501 ◽

Cited By ~ 24

Author(s):

S. V. Singh ◽

P. Kempkes ◽

H. Soltwisch

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Transition Region ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Mode Transition ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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Effect of electron energy distribution function on power deposition and plasma density in an inductively coupled discharge at very low pressures

Plasma Sources Science and Technology ◽

10.1088/0963-0252/12/3/302 ◽

2003 ◽

Vol 12 (3) ◽

pp. 302-312 ◽

Cited By ~ 21

Author(s):

Badri Ramamurthi ◽

Demetre J Economou ◽

Igor D Kaganovich

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Plasma Density ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Power Deposition ◽

Inductively Coupled ◽

Low Pressures

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Electron energy distribution modification by RF bias in Ar/SF6 inductively coupled plasmas

Applied Physics Letters ◽

10.1063/1.5110219 ◽

2019 ◽

Vol 115 (6) ◽

pp. 064102 ◽

Cited By ~ 3

Author(s):

Hyo-Chang Lee ◽

Chin-Wook Chung ◽

J. H. Kim ◽

D. J. Seong

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Tuning effect of inert gas mixing on electron energy distribution function in inductively coupled discharges

Plasma Physics and Controlled Fusion ◽

10.1088/0741-3335/48/1/006 ◽

2005 ◽

Vol 48 (1) ◽

pp. 61-70 ◽

Cited By ~ 15

Author(s):

Yi-Kang Pu ◽

Zhi-Gang Guo ◽

Aman-ur-Rehman ◽

Zhen-Dong Yu ◽

Jie Ma

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Inert Gas ◽

Electron Energy Distribution ◽

Gas Mixing ◽

Inductively Coupled

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Response to “Comment on ‘Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas’” [Phys. Plasmas 22, 044701 (2015)]

Physics of Plasmas ◽

10.1063/1.4916651 ◽

2015 ◽

Vol 22 (4) ◽

pp. 044702

Author(s):

June Young Kim ◽

Young-Cheol Kim ◽

Yu-Sin Kim ◽

Chin-Wook Chung

Keyword(s):

Energy Loss ◽

Energy Distribution ◽

Total Energy ◽

Electron Energy ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Diagnostics of chlorine inductively coupled plasmas. Measurement of electron temperatures and electron energy distribution functions

Journal of Applied Physics ◽

10.1063/1.372072 ◽

2000 ◽

Vol 87 (4) ◽

pp. 1642-1649 ◽

Cited By ~ 89

Author(s):

M. V. Malyshev ◽

V. M. Donnelly

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas ◽

Energy Distribution Functions

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