Electron energy distribution modification by RF bias in Ar/SF6 inductively coupled plasmas

Hyo-Chang Lee; Chin-Wook Chung; J. H. Kim; D. J. Seong

doi:10.1063/1.5110219

Electron energy distribution modification by RF bias in Ar/SF6 inductively coupled plasmas

Applied Physics Letters ◽

10.1063/1.5110219 ◽

2019 ◽

Vol 115 (6) ◽

pp. 064102 ◽

Cited By ~ 3

Author(s):

Hyo-Chang Lee ◽

Chin-Wook Chung ◽

J. H. Kim ◽

D. J. Seong

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Modeling argon inductively coupled plasmas: The electron energy distribution function and metastable kinetics

Journal of Applied Physics ◽

10.1063/1.1452772 ◽

2002 ◽

Vol 91 (6) ◽

pp. 3539-3546 ◽

Cited By ~ 55

Author(s):

Mark W. Kiehlbauch ◽

David B. Graves

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Lorentz force effect on electron energy distribution in low pressure inductively coupled plasmas

IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) ◽

10.1109/ppps.2001.961052 ◽

2002 ◽

Author(s):

V.I. Kolobov ◽

V.A. Godyak

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Lorentz Force ◽

Low Pressure ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Force Effect ◽

Inductively Coupled ◽

Coupled Plasmas

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Response to “Comment on ‘Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas’” [Phys. Plasmas 22, 044701 (2015)]

Physics of Plasmas ◽

10.1063/1.4916651 ◽

2015 ◽

Vol 22 (4) ◽

pp. 044702

Author(s):

June Young Kim ◽

Young-Cheol Kim ◽

Yu-Sin Kim ◽

Chin-Wook Chung

Keyword(s):

Energy Loss ◽

Energy Distribution ◽

Total Energy ◽

Electron Energy ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Diagnostics of chlorine inductively coupled plasmas. Measurement of electron temperatures and electron energy distribution functions

Journal of Applied Physics ◽

10.1063/1.372072 ◽

2000 ◽

Vol 87 (4) ◽

pp. 1642-1649 ◽

Cited By ~ 89

Author(s):

M. V. Malyshev ◽

V. M. Donnelly

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas ◽

Energy Distribution Functions

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Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas

Physics of Plasmas ◽

10.1063/1.4905515 ◽

2015 ◽

Vol 22 (1) ◽

pp. 013501 ◽

Cited By ~ 3

Author(s):

June Young Kim ◽

Young-Cheol Kim ◽

Yu-Sin Kim ◽

Chin-Wook Chung

Keyword(s):

Energy Loss ◽

Energy Distribution ◽

Total Energy ◽

Electron Energy ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Lorentz force effects on the electron energy distribution in inductively coupled plasmas

Physical Review E ◽

10.1103/physreve.64.026406 ◽

2001 ◽

Vol 64 (2) ◽

Cited By ~ 34

Author(s):

V. A. Godyak ◽

B. M. Alexandrovich ◽

V. I. Kolobov

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Lorentz Force ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Comment on “Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas” [Phys. Plasmas 22, 013501 (2015)]

Physics of Plasmas ◽

10.1063/1.4916650 ◽

2015 ◽

Vol 22 (4) ◽

pp. 044701 ◽

Cited By ~ 2

Author(s):

E. A. Bogdanov ◽

S. I. Eliseev ◽

A. A. Kudryavtsev

Keyword(s):

Energy Loss ◽

Energy Distribution ◽

Total Energy ◽

Electron Energy ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.5133978 ◽

2020 ◽

Vol 38 (2) ◽

pp. 022801

Author(s):

Ju-Ho Kim ◽

Deuk-Chul Kwon ◽

Chin-Wook Chung

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Frequency ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Low Frequency Power ◽

Coupled Plasmas ◽

Frequency Power

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Control of electron energy distributions in inductively coupled plasmas using tandem sources

2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2013.6634887 ◽

2013 ◽

Author(s):

Michael D. Logue ◽

Mark J. Kushner ◽

Weiye Zhu ◽

Hyungjoo Shin ◽

Lei Liu ◽

...

Keyword(s):

Electron Energy ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Inductively Coupled ◽

Coupled Plasmas

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Comparison of pressure dependence of electron energy distributions in oxygen capacitively and inductively coupled plasmas

Physical Review E ◽

10.1103/physreve.81.046402 ◽

2010 ◽

Vol 81 (4) ◽

Cited By ~ 25

Author(s):

Min-Hyong Lee ◽

Hyo-Chang Lee ◽

Chin-Wook Chung

Keyword(s):

Electron Energy ◽

Pressure Dependence ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Inductively Coupled ◽

Coupled Plasmas

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