Diagnostics of chlorine inductively coupled plasmas. Measurement of electron temperatures and electron energy distribution functions

M. V. Malyshev; V. M. Donnelly

doi:10.1063/1.372072

Diagnostics of chlorine inductively coupled plasmas. Measurement of electron temperatures and electron energy distribution functions

Journal of Applied Physics ◽

10.1063/1.372072 ◽

2000 ◽

Vol 87 (4) ◽

pp. 1642-1649 ◽

Cited By ~ 89

Author(s):

M. V. Malyshev ◽

V. M. Donnelly

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas ◽

Energy Distribution Functions

Download Full-text

Modeling argon inductively coupled plasmas: The electron energy distribution function and metastable kinetics

Journal of Applied Physics ◽

10.1063/1.1452772 ◽

2002 ◽

Vol 91 (6) ◽

pp. 3539-3546 ◽

Cited By ~ 55

Author(s):

Mark W. Kiehlbauch ◽

David B. Graves

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Lorentz force effect on electron energy distribution in low pressure inductively coupled plasmas

IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) ◽

10.1109/ppps.2001.961052 ◽

2002 ◽

Author(s):

V.I. Kolobov ◽

V.A. Godyak

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Lorentz Force ◽

Low Pressure ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Force Effect ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Theoretical investigation of the evolution of electron energy distribution functions in inductively coupled discharges

Thin Solid Films ◽

10.1016/s0040-6090(03)00375-4 ◽

2003 ◽

Vol 435 (1-2) ◽

pp. 72-77 ◽

Cited By ~ 10

Author(s):

S.S. Kim ◽

Chin Wook Chung ◽

H.Y. Chang

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Theoretical Investigation ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Inductively Coupled ◽

Energy Distribution Functions

Download Full-text

Electron energy distribution functions in low-pressure inductively coupled bounded plasmas

Physics of Plasmas ◽

10.1063/1.2339024 ◽

2006 ◽

Vol 13 (9) ◽

pp. 092104 ◽

Cited By ~ 45

Author(s):

Albert Meige ◽

Rod W. Boswell

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Low Pressure ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Inductively Coupled ◽

Energy Distribution Functions

Download Full-text

Electron energy distribution modification by RF bias in Ar/SF6 inductively coupled plasmas

Applied Physics Letters ◽

10.1063/1.5110219 ◽

2019 ◽

Vol 115 (6) ◽

pp. 064102 ◽

Cited By ~ 3

Author(s):

Hyo-Chang Lee ◽

Chin-Wook Chung ◽

J. H. Kim ◽

D. J. Seong

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Response to “Comment on ‘Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas’” [Phys. Plasmas 22, 044701 (2015)]

Physics of Plasmas ◽

10.1063/1.4916651 ◽

2015 ◽

Vol 22 (4) ◽

pp. 044702

Author(s):

June Young Kim ◽

Young-Cheol Kim ◽

Yu-Sin Kim ◽

Chin-Wook Chung

Keyword(s):

Energy Loss ◽

Energy Distribution ◽

Total Energy ◽

Electron Energy ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Effect of non-Maxwellian electron energy distribution functions on the simulation of an inductively coupled Ar–Hg discharge

Plasma Sources Science and Technology ◽

10.1088/0963-0252/22/3/035002 ◽

2013 ◽

Vol 22 (3) ◽

pp. 035002 ◽

Cited By ~ 2

Author(s):

Yang Liu ◽

Georges Zissis ◽

Yuming Chen

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Inductively Coupled ◽

Energy Distribution Functions

Download Full-text

Measurements of Electron Energy Distribution Functions in Pulse-Modulated Ar and Ar/O2Inductively Coupled Plasmas using Laser Thomson Scattering

Japanese Journal of Applied Physics ◽

10.1143/jjap.45.8118 ◽

2006 ◽

Vol 45 (10B) ◽

pp. 8118-8122

Author(s):

Mansour A. M. El-Sabbagh ◽

Akinobu Nakamura ◽

Toshiro Yanagai ◽

Yukihiko Yamagata ◽

Kiichiro Uchino

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Thomson Scattering ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Coupled Plasmas ◽

Energy Distribution Functions

Download Full-text

Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas

Physics of Plasmas ◽

10.1063/1.4905515 ◽

2015 ◽

Vol 22 (1) ◽

pp. 013501 ◽

Cited By ~ 3

Author(s):

June Young Kim ◽

Young-Cheol Kim ◽

Yu-Sin Kim ◽

Chin-Wook Chung

Keyword(s):

Energy Loss ◽

Energy Distribution ◽

Total Energy ◽

Electron Energy ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Combined effects of gas pressure and exciting frequency on electron energy distribution functions in hydrogen capacitively coupled plasmas

Physics of Plasmas ◽

10.1063/1.4789611 ◽

2013 ◽

Vol 20 (2) ◽

pp. 023501 ◽

Cited By ~ 11

Author(s):

E. Abdel-Fattah ◽

H. Sugai

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Distribution Functions ◽

Gas Pressure ◽

Combined Effects ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Exciting Frequency ◽

Coupled Plasmas ◽

Energy Distribution Functions

Download Full-text